In a STEM an electron beam is focused into a small probe on the specimen. This probe is raster scanned across the specimen to form an image from the electrons transmitted through the specimen. The objective lens is positioned before the specimen instead of after the specimen as in a CTEM. Because the probe is focused and scanned before the specimen, accurate annular dark field (ADF) STEM image simulation is more difficult than CTEM simulation. Instead of an incident uniform plane wave, ADF-STEM simulation starts with a probe wavefunction focused at a specified position on the specimen. The wavefunction is then propagated through the specimen one atomic layer (or slice) at a time with Fresnel diffraction between slices using the multislice method. After passing through the specimen the wavefunction is diffracted onto the detector. The ADF signal for one position of the probe is formed by integrating all electrons scattered outside of an inner angle large compared with the objective aperture.
On the Limits of High Angle Annular Dark Field (HAADF) Tomography; Electron Beam Damage
