Electron Channeling and Ion Channeling Contrast Imaging of Dislocations in Nitride Thin Films
2008 ◽
Vol 14
(S2)
◽
pp. 1194-1195
◽
Extended abstract of a paper presented at Microscopy and Microanalysis 2008 in Albuquerque, New Mexico, USA, August 3 – August 7, 2008