Recent Advances in Liquid-phase Electron-Beam Induced Deposition: Characterizing Growth Processes and Optical Properties

2011 ◽  
Vol 17 (S2) ◽  
pp. 438-439 ◽  
Author(s):  
E Donev ◽  
N Nehru ◽  
G Schardein ◽  
J Wright ◽  
A Chamberlain ◽  
...  
Keyword(s):  
Optical Properties ◽  
Electron Beam ◽  
Liquid Phase ◽  
Growth Processes ◽  
Recent Advances ◽  
Electron Beam Induced Deposition

Extended abstract of a paper presented at Microscopy and Microanalysis 2011 in Nashville, Tennessee, USA, August 7–August 11, 2011.

Advances in Liquid Phase Conversion of (100) and (111) Oriented Si Wafers into Self-Standing 3C-SiC

2009 ◽  
Vol 615-617 ◽  
pp. 49-52 ◽  
Author(s):  
Marcin Zielinski ◽  
Marc Portail ◽  
Thierry Chassagne ◽  
Sandrine Juillaguet ◽  
Hervé Peyre ◽  
...  
Keyword(s):  
Growth Rate ◽  
Optical Properties ◽  
Liquid Phase ◽  
Phase Conversion ◽  
Liquid Phase Epitaxial ◽  
Stress Control ◽  
Recent Advances ◽  
Si Wafer

We report on recent advances in liquid phase epitaxial (LPE) conversion of a bulk Si wafer into self standing 3C-SiC. This includes the role of the stress control within the (100) oriented “crucibles”, the elaboration of crack-free (111) “crucibles” and the successful conversion of (100) and (111) oriented Si wafer. To date up to 100µm thick 3C-SiC(100) as well as 30µm thick crack-free 3C-SiC (111) materials have been obtained. The growth rate ranges from 20 to 100µm/h and locally can even reach ~1mm/h. In this work we focus on the structural, morphological and optical properties of the LPE-grown material.

scholarly journals Unveiling the optical properties of a metamaterial synthesized by electron-beam-induced deposition

2015 ◽  
Vol 27 (2) ◽  
pp. 025705 ◽  
Author(s):  
P Woźniak ◽  
K Höflich ◽  
G Brönstrup ◽  
P Banzer ◽  
S Christiansen ◽  
...  
Keyword(s):  
Optical Properties ◽  
Electron Beam ◽  
Electron Beam Induced Deposition

Electron beam induced deposition of silicon nanostructures from a liquid phase precursor

2012 ◽  
Vol 23 (38) ◽  
pp. 385302 ◽  
Author(s):  
Yin Liu ◽  
Xin Chen ◽  
Kyong Wook Noh ◽  
Shen J Dillon
Keyword(s):  
Electron Beam ◽  
Liquid Phase ◽  
Silicon Nanostructures ◽  
Phase Precursor ◽  
Electron Beam Induced Deposition

Liquid Phase Electron-Beam-Induced Deposition on Bulk Substrates Using Environmental Scanning Electron Microscopy

2014 ◽  
Vol 20 (2) ◽  
pp. 376-384 ◽  
Author(s):  
Matthew Bresin ◽  
Aurelien Botman ◽  
Steven J Randolph ◽  
Marcus Straw ◽  
Jeffrey Todd Hastings
Keyword(s):  
Electron Beam ◽  
Liquid Phase ◽  
Environmental Scanning Electron Microscopy ◽  
Injection System ◽  
Environmental Scanning ◽  
Liquid Droplets ◽  
Liquid Injection ◽  
Electron Beam Induced Deposition ◽  
Scanning Electron

AbstractThe introduction of gases, such as water vapor, into an environmental scanning electron microscope is common practice to assist in the imaging of insulating or biological materials. However, this capability may also be exploited to introduce, or form, liquid phase precursors for electron-beam-induced deposition. In this work, the authors report the deposition of silver (Ag) and copper (Cu) structures using two different cell-less in situ deposition methods—the first involving the in situ hydration of solid precursors and the second involving the insertion of liquid droplets using a capillary style liquid injection system. Critically, the inclusion of surfactants is shown to drastically improve pattern replication without diminishing the purity of the metal deposits. Surfactants are estimated to reduce the droplet contact angle to below ~10°.

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