Fifteen Nanometer Resolved Patterns in Selective Area Atomic Layer Deposition—Defectivity Reduction by Monolayer Design
2018 ◽
Vol 10
(44)
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pp. 38630-38637
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2016 ◽
Vol 34
(1)
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pp. 01A148
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Keyword(s):
2017 ◽
Vol 147
(15)
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pp. 154702
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2006 ◽
Vol 12
(7)
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pp. 415-417
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Keyword(s):
Keyword(s):
Keyword(s):
2010 ◽
Vol 157
(1)
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pp. K10
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