Microcontact Printed RuOx Film as an Activation Layer for Selective-Area Atomic Layer Deposition of Ruthenium

2012 ◽  
Vol 24 (2) ◽  
pp. 275-278 ◽  
Author(s):  
Elina Färm ◽  
Seppo Lindroos ◽  
Mikko Ritala ◽  
Markku Leskelä
Keyword(s):  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Selective Area ◽  
Layer Deposition

Fifteen Nanometer Resolved Patterns in Selective Area Atomic Layer Deposition—Defectivity Reduction by Monolayer Design

2018 ◽  
Vol 10 (44) ◽  
pp. 38630-38637 ◽  
Author(s):  
Rudy Wojtecki ◽  
Magi Mettry ◽  
Noah F. Fine Nathel ◽  
Alexander Friz ◽  
Anuja De Silva ◽  
...  
Keyword(s):  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Selective Area ◽  
Layer Deposition

(Invited) Using Inherent Substrate-Dependent Nucleation to Promote Metal and Metal Oxide Selective-Area Atomic Layer Deposition

2016 ◽  
Vol 75 (6) ◽  
pp. 77-83 ◽  
Author(s):  
G. N. Parsons ◽  
B. Kalanyan ◽  
S. E. Atanasov ◽  
P. Lemaire ◽  
C. Oldham
Keyword(s):  
Atomic Layer Deposition ◽  
Metal Oxide ◽  
Atomic Layer ◽  
Selective Area ◽  
Layer Deposition

scholarly journals Selective-Area, Water-Free Atomic Layer Deposition of Metal Oxides on Graphene Defects

2021 ◽  
Author(s):  
Michael F. Mazza ◽  
Miguel Cabán-Acevedo ◽  
Harold J. Fu ◽  
Madeline C. Meier ◽  
Annelise C. Thompson ◽  
...  
Keyword(s):  
Atomic Layer Deposition ◽  
Metal Oxides ◽  
Atomic Layer ◽  
Selective Area ◽  
Layer Deposition

Selective-Area Atomic Layer Deposition Using Poly(vinyl pyrrolidone) as a Passivation Layer

2010 ◽  
Vol 157 (1) ◽  
pp. K10 ◽  
Author(s):  
Elina Färm ◽  
Marianna Kemell ◽  
Eero Santala ◽  
Mikko Ritala ◽  
Markku Leskelä
Keyword(s):  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Passivation Layer ◽  
Vinyl Pyrrolidone ◽  
Selective Area ◽  
Layer Deposition ◽  
Poly Vinyl Pyrrolidone
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