Inherent substrate-dependent growth initiation and selective-area atomic layer deposition of TiO2 using “water-free” metal-halide/metal alkoxide reactants

2016 ◽  
Vol 34 (1) ◽  
pp. 01A148 ◽  
Author(s):  
Sarah E. Atanasov ◽  
Berç Kalanyan ◽  
Gregory N. Parsons
Keyword(s):  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Metal Halide ◽  
Metal Alkoxide ◽  
Selective Area ◽  
Layer Deposition ◽  
Growth Initiation ◽  
Dependent Growth ◽  
Free Metal

Atomic layer deposition of HfO2: Growth initiation study on metallic underlayers

2010 ◽  
Vol 518 (15) ◽  
pp. 4081-4086 ◽  
Author(s):  
Christopher L. Platt ◽  
Ning Li ◽  
Kejing Li ◽  
Tonya M. Klein
Keyword(s):  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Layer Deposition ◽  
Growth Initiation

Microcontact Printed RuOx Film as an Activation Layer for Selective-Area Atomic Layer Deposition of Ruthenium

2012 ◽  
Vol 24 (2) ◽  
pp. 275-278 ◽  
Author(s):  
Elina Färm ◽  
Seppo Lindroos ◽  
Mikko Ritala ◽  
Markku Leskelä
Keyword(s):  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Selective Area ◽  
Layer Deposition

Tailoring the Surface of Metal Halide Perovskites to Enable the Atomic Layer Deposition of Metal Oxide Contacts

2021 ◽  
Vol 4 (9) ◽  
pp. 9871-9880
Author(s):  
James A. Raiford ◽  
Cullen Chosy ◽  
Benjamin A. Reeves ◽  
Stacey F. Bent
Keyword(s):  
Atomic Layer Deposition ◽  
Metal Oxide ◽  
Atomic Layer ◽  
Metal Halide ◽  
Layer Deposition ◽  
Halide Perovskites

Mechanism for growth initiation on aminosilane-functionalized SiO2 during area-selective atomic layer deposition of ZrO2

2021 ◽  
Vol 39 (3) ◽  
pp. 032402
Author(s):  
Wanxing Xu ◽  
Paul C. Lemaire ◽  
Kashish Sharma ◽  
Ryan J. Gasvoda ◽  
Dennis M. Hausmann ◽  
...  
Keyword(s):  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Layer Deposition ◽  
Growth Initiation

Fifteen Nanometer Resolved Patterns in Selective Area Atomic Layer Deposition—Defectivity Reduction by Monolayer Design

2018 ◽  
Vol 10 (44) ◽  
pp. 38630-38637 ◽  
Author(s):  
Rudy Wojtecki ◽  
Magi Mettry ◽  
Noah F. Fine Nathel ◽  
Alexander Friz ◽  
Anuja De Silva ◽  
...  
Keyword(s):  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Selective Area ◽  
Layer Deposition
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