Selective area atomic layer deposition of rhodium and effective work function characterization in capacitor structures

2006 ◽  
Vol 89 (4) ◽  
pp. 043111 ◽  
Author(s):  
K. J. Park ◽  
G. N. Parsons
Keyword(s):  
Atomic Layer Deposition ◽  
Work Function ◽  
Atomic Layer ◽  
Effective Work ◽  
Effective Work Function ◽  
Selective Area ◽  
Layer Deposition ◽  
Function Characterization

Microcontact Printed RuOx Film as an Activation Layer for Selective-Area Atomic Layer Deposition of Ruthenium

2012 ◽  
Vol 24 (2) ◽  
pp. 275-278 ◽  
Author(s):  
Elina Färm ◽  
Seppo Lindroos ◽  
Mikko Ritala ◽  
Markku Leskelä
Keyword(s):  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Selective Area ◽  
Layer Deposition

Investigation of Thermal Atomic Layer Deposited TaAlC with Low Effective Work-Function on HfO2Dielectric Using TaCl5and TEA as Precursors

2016 ◽  
Vol 6 (1) ◽  
pp. P38-P41 ◽  
Author(s):  
Jinjuan Xiang ◽  
Xiaolei Wang ◽  
Tingting Li ◽  
Jianfeng Gao ◽  
Kai Han ◽  
...  
Keyword(s):  
Work Function ◽  
Atomic Layer ◽  
Effective Work ◽  
Effective Work Function

Effective work function tunability and interfacial reactions with underlying HfO2 layer of plasma-enhanced atomic layer deposited TaCxNy films

2008 ◽  
Vol 92 (20) ◽  
pp. 202902 ◽  
Author(s):  
Tae Joo Park ◽  
Jeong Hwan Kim ◽  
Jae Hyuck Jang ◽  
Kwang Duk Na ◽  
Cheol Seong Hwang ◽  
...  
Keyword(s):  
Work Function ◽  
Atomic Layer ◽  
Interfacial Reactions ◽  
Effective Work ◽  
Effective Work Function

Atomic layer deposition of HfxAlyCz as a work function material in metal gate MOS devices

2014 ◽  
Vol 32 (1) ◽  
pp. 01A118 ◽  
Author(s):  
Albert Lee ◽  
Nobi Fuchigami ◽  
Divya Pisharoty ◽  
Zhendong Hong ◽  
Ed Haywood ◽  
...  
Keyword(s):  
Atomic Layer Deposition ◽  
Work Function ◽  
Atomic Layer ◽  
Metal Gate ◽  
Mos Devices ◽  
Layer Deposition

Fifteen Nanometer Resolved Patterns in Selective Area Atomic Layer Deposition—Defectivity Reduction by Monolayer Design

2018 ◽  
Vol 10 (44) ◽  
pp. 38630-38637 ◽  
Author(s):  
Rudy Wojtecki ◽  
Magi Mettry ◽  
Noah F. Fine Nathel ◽  
Alexander Friz ◽  
Anuja De Silva ◽  
...  
Keyword(s):  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Selective Area ◽  
Layer Deposition
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