Large Area Single-Crystal Diamond Synthesis by 915 MHz Microwave Plasma-Assisted Chemical Vapor Deposition

2014 ◽  
Vol 14 (7) ◽  
pp. 3234-3238 ◽  
Author(s):  
Qi Liang ◽  
Chih-shiue Yan ◽  
Joseph Lai ◽  
Yu-fei Meng ◽  
Szczesny Krasnicki ◽  
...  
Keyword(s):  
Chemical Vapor Deposition ◽  
Single Crystal ◽  
Vapor Deposition ◽  
Microwave Plasma ◽  
Chemical Vapor ◽  
Diamond Synthesis ◽  
Large Area ◽  
Single Crystal Diamond ◽  
Single Crystal Diamond Synthesis

Multiple substrate microwave plasma-assisted chemical vapor deposition single crystal diamond synthesis

2008 ◽  
Vol 93 (3) ◽  
pp. 031502 ◽  
Author(s):  
J. Asmussen ◽  
T. A. Grotjohn ◽  
T. Schuelke ◽  
M. F. Becker ◽  
M. K. Yaran ◽  
...  
Keyword(s):  
Chemical Vapor Deposition ◽  
Single Crystal ◽  
Vapor Deposition ◽  
Microwave Plasma ◽  
Chemical Vapor ◽  
Diamond Synthesis ◽  
Single Crystal Diamond ◽  
Multiple Substrate ◽  
Single Crystal Diamond Synthesis

Lateral outward growth of single-crystal diamond by two different structures of microwave plasma reactors

CrystEngComm ◽  
2022 ◽  
Author(s):  
Wei Cao ◽  
Zhibin Ma ◽  
Hongyang Zhao ◽  
Deng Gao ◽  
Qiuming Fu
Keyword(s):  
Chemical Vapor Deposition ◽  
Single Crystal ◽  
Vapor Deposition ◽  
Microwave Plasma ◽  
Chemical Vapor ◽  
Lateral Growth ◽  
Plasma Reactors ◽  
Plasma Chemical ◽  
Plasma Chemical Vapor Deposition ◽  
Single Crystal Diamond

On a semi-open holder, the homoepitaxial lateral growth of single-crystal diamond (SCD) was carried out via microwave plasma chemical vapor deposition (MPCVD). By tuning and optimizing two different structures of...

Homoepitaxial growth of single crystal diamond by microwave plasma chemical vapor deposition

Carbon ◽  
2017 ◽  
Vol 117 ◽  
pp. 490
Author(s):  
Lei Yan ◽  
Zhi-bin Ma ◽  
Lin Chen ◽  
Qiu-ming Fu ◽  
Chao Wu ◽  
...  
Keyword(s):  
Chemical Vapor Deposition ◽  
Single Crystal ◽  
Vapor Deposition ◽  
Microwave Plasma ◽  
Chemical Vapor ◽  
Plasma Chemical ◽  
Plasma Chemical Vapor Deposition ◽  
Homoepitaxial Growth ◽  
Single Crystal Diamond

Growth and Characterization of the Laterally Enlarged Single Crystal Diamond Grown by Microwave Plasma Chemical Vapor Deposition

2018 ◽  
Vol 35 (7) ◽  
pp. 078101 ◽  
Author(s):  
Ze-Yang Ren ◽  
Jin-Feng Zhang ◽  
Jin-Cheng Zhang ◽  
Sheng-Rui Xu ◽  
Chun-Fu Zhang ◽  
...  
Keyword(s):  
Chemical Vapor Deposition ◽  
Single Crystal ◽  
Vapor Deposition ◽  
Microwave Plasma ◽  
Chemical Vapor ◽  
Plasma Chemical ◽  
Plasma Chemical Vapor Deposition ◽  
Single Crystal Diamond

Synthesis of boron-doped homoepitaxial single crystal diamond by microwave plasma chemical vapor deposition

2008 ◽  
Vol 17 (7-10) ◽  
pp. 1320-1323 ◽  
Author(s):  
R. Ramamurti ◽  
M. Becker ◽  
T. Schuelke ◽  
T. Grotjohn ◽  
D. Reinhard ◽  
...  
Keyword(s):  
Chemical Vapor Deposition ◽  
Single Crystal ◽  
Vapor Deposition ◽  
Microwave Plasma ◽  
Chemical Vapor ◽  
Plasma Chemical ◽  
Plasma Chemical Vapor Deposition ◽  
Boron Doped ◽  
Single Crystal Diamond

Synthesis of single crystal diamond by microwave plasma assisted chemical vapor deposition with in situ low-coherence interferometric control of growth rate

2016 ◽  
Vol 66 ◽  
pp. 83-89 ◽  
Author(s):  
E.V. Bushuev ◽  
V.Yu. Yurov ◽  
A.P. Bolshakov ◽  
V.G. Ralchenko ◽  
E.E. Ashkinazi ◽  
...  
Keyword(s):  
Growth Rate ◽  
Chemical Vapor Deposition ◽  
Single Crystal ◽  
Vapor Deposition ◽  
Microwave Plasma ◽  
Chemical Vapor ◽  
Low Coherence ◽  
Single Crystal Diamond

Step growth in single crystal diamond grown by microwave plasma chemical vapor deposition

2006 ◽  
Vol 15 (2-3) ◽  
pp. 304-308 ◽  
Author(s):  
Pawan K. Tyagi ◽  
Abha Misra ◽  
K.N. Narayanan Unni ◽  
Padmnabh Rai ◽  
Manoj K. Singh ◽  
...  
Keyword(s):  
Chemical Vapor Deposition ◽  
Single Crystal ◽  
Vapor Deposition ◽  
Microwave Plasma ◽  
Chemical Vapor ◽  
Plasma Chemical ◽  
Plasma Chemical Vapor Deposition ◽  
Single Crystal Diamond ◽  
Step Growth

Enhanced growth of high quality single crystal diamond by microwave plasma assisted chemical vapor deposition at high gas pressures

2009 ◽  
Vol 94 (2) ◽  
pp. 024103 ◽  
Author(s):  
Qi Liang ◽  
Cheng Yi Chin ◽  
Joseph Lai ◽  
Chih-shiue Yan ◽  
Yufei Meng ◽  
...  
Keyword(s):  
Chemical Vapor Deposition ◽  
Single Crystal ◽  
Vapor Deposition ◽  
Microwave Plasma ◽  
Chemical Vapor ◽  
High Quality ◽  
High Quality Single Crystal ◽  
Single Crystal Diamond ◽  
Gas Pressures
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