Computational Study of the Gas Phase Reactions of Isopropylimido and Allylimido Tungsten Precursors for Chemical Vapor Deposition of Tungsten Carbonitride Films: Implications for the Choice of Carrier Gas
2007 ◽
Vol 81
(4)
◽
pp. 515-523
◽
2016 ◽
Vol 51
(8)
◽
pp. 3897-3906
◽
1995 ◽
Vol 142
(7)
◽
pp. 2357-2362
◽
Keyword(s):
1993 ◽
Vol 163
(1)
◽
pp. 135-140
◽
Keyword(s):
1996 ◽
Vol 14
(2)
◽
pp. 772
◽
Keyword(s):
Keyword(s):