Advanced Nanocluster Ion Source Based on High-Power Impulse Magnetron Sputtering and Time-Resolved Measurements of Nanocluster Formation

2013 ◽  
Vol 117 (40) ◽  
pp. 10211-10217 ◽  
Author(s):  
Chuhang Zhang ◽  
Hironori Tsunoyama ◽  
Hiroki Akatsuka ◽  
Hiroki Sekiya ◽  
Tomomi Nagase ◽  
...  
Keyword(s):  
Magnetron Sputtering ◽  
High Power ◽  
Ion Source ◽  
Time Resolved ◽  
Time Resolved Measurements

Development of High-flux Ion Source for Size-selected Nanocluster Ions Based on High-power Impulse Magnetron Sputtering

2013 ◽  
Vol 42 (8) ◽  
pp. 857-859 ◽  
Author(s):  
Hironori Tsunoyama ◽  
Chuhang Zhang ◽  
Hiroki Akatsuka ◽  
Hiroki Sekiya ◽  
Tomomi Nagase ◽  
...  
Keyword(s):  
Magnetron Sputtering ◽  
High Power ◽  
Ion Source ◽  
High Flux

scholarly journals Influence of the High-Power Impulse Magnetron Sputtering Voltage on the Time-Resolved Platinum Ions Energy Distributions

2014 ◽  
Vol 42 (10) ◽  
pp. 2818-2819 ◽  
Author(s):  
Stephane Cuynet ◽  
Amael Caillard ◽  
Thomas Lecas ◽  
Sebastien Dozias ◽  
Philippe Lefaucheux ◽  
...  
Keyword(s):  
Magnetron Sputtering ◽  
High Power ◽  
Energy Distributions ◽  
Time Resolved

Time-resolved Langmuir probe investigation of hybrid high power impulse magnetron sputtering discharges

Vacuum ◽  
2013 ◽  
Vol 90 ◽  
pp. 176-181 ◽  
Author(s):  
Steffen Drache ◽  
Vitezslav Stranak ◽  
Ann-Pierra Herrendorf ◽  
Martin Cada ◽  
Zdenek Hubicka ◽  
...  
Keyword(s):  
Magnetron Sputtering ◽  
High Power ◽  
Langmuir Probe ◽  
Time Resolved ◽  
Probe Investigation

System for time-resolved laser absorption spectroscopy and its application to high-power impulse magnetron sputtering

2017 ◽  
Vol 88 (2) ◽  
pp. 023105
Author(s):  
P. Adámek ◽  
J. Olejníček ◽  
Z. Hubička ◽  
M. Čada ◽  
Š. Kment ◽  
...  
Keyword(s):  
Magnetron Sputtering ◽  
Absorption Spectroscopy ◽  
High Power ◽  
Laser Absorption Spectroscopy ◽  
Time Resolved ◽  
Laser Absorption

Time-Resolved Diagnostics of Dual High Power Impulse Magnetron Sputtering With Pulse Delays of 15 µs and 500 µs

2011 ◽  
Vol 51 (2-3) ◽  
pp. 237-245 ◽  
Author(s):  
V. Stranak ◽  
S. Drache ◽  
M. Cada ◽  
Z. Hubicka ◽  
M. Tichy ◽  
...  
Keyword(s):  
Magnetron Sputtering ◽  
High Power ◽  
Time Resolved
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