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Time-resolved ion flux and impedance measurements for process characterization in reactive high-power impulse magnetron sputtering
Journal of Vacuum Science & Technology A Vacuum Surfaces and Films
◽
10.1116/1.4953033
◽
2016
◽
Vol 34
(4)
◽
pp. 041305
◽
Cited By ~ 11
Author(s):
Daniel Lundin
◽
Martin Čada
◽
Zdenĕk Hubička
Keyword(s):
Magnetron Sputtering
◽
High Power
◽
Ion Flux
◽
Time Resolved
◽
Impedance Measurements
◽
Process Characterization
Download Full-text
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References
The ion energy distributions and ion flux composition from a high power impulse magnetron sputtering discharge
Thin Solid Films
◽
10.1016/j.tsf.2006.04.051
◽
2006
◽
Vol 515
(4)
◽
pp. 1522-1526
◽
Cited By ~ 215
Author(s):
J. Bohlmark
◽
M. Lattemann
◽
J.T. Gudmundsson
◽
A.P. Ehiasarian
◽
Y. Aranda Gonzalvo
◽
...
Keyword(s):
Magnetron Sputtering
◽
High Power
◽
Ion Flux
◽
Energy Distributions
◽
Ion Energy
◽
Flux Composition
◽
Ion Energy Distributions
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Time-resolved study and comparison of plasmas in high power pulsed and modulated pulse power magnetron sputtering
2011 Abstracts IEEE International Conference on Plasma Science
◽
10.1109/plasma.2011.5993015
◽
2011
◽
Author(s):
L. Meng
◽
T.S. Cho
◽
S. Jung
◽
D.N. Ruzic
Keyword(s):
Magnetron Sputtering
◽
High Power
◽
Pulse Power
◽
Time Resolved
Download Full-text
Ion flux characteristics in high-power pulsed magnetron sputtering discharges
EPL (Europhysics Letters)
◽
10.1209/0295-5075/77/45002
◽
2007
◽
Vol 77
(4)
◽
pp. 45002
◽
Cited By ~ 51
Author(s):
J Vlček
◽
P Kudláček
◽
K Burcalová
◽
J Musil
Keyword(s):
Magnetron Sputtering
◽
High Power
◽
Ion Flux
◽
Pulsed Magnetron
Download Full-text
Influence of the High-Power Impulse Magnetron Sputtering Voltage on the Time-Resolved Platinum Ions Energy Distributions
IEEE Transactions on Plasma Science
◽
10.1109/tps.2014.2325061
◽
2014
◽
Vol 42
(10)
◽
pp. 2818-2819
◽
Cited By ~ 1
Author(s):
Stephane Cuynet
◽
Amael Caillard
◽
Thomas Lecas
◽
Sebastien Dozias
◽
Philippe Lefaucheux
◽
...
Keyword(s):
Magnetron Sputtering
◽
High Power
◽
Energy Distributions
◽
Time Resolved
Download Full-text
Time-resolved Langmuir probe investigation of hybrid high power impulse magnetron sputtering discharges
Vacuum
◽
10.1016/j.vacuum.2012.02.047
◽
2013
◽
Vol 90
◽
pp. 176-181
◽
Cited By ~ 11
Author(s):
Steffen Drache
◽
Vitezslav Stranak
◽
Ann-Pierra Herrendorf
◽
Martin Cada
◽
Zdenek Hubicka
◽
...
Keyword(s):
Magnetron Sputtering
◽
High Power
◽
Langmuir Probe
◽
Time Resolved
◽
Probe Investigation
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Time and energy resolved ion mass spectroscopy studies of the ion flux during high power pulsed magnetron sputtering of Cr in Ar and Ar/N2 atmospheres
Vacuum
◽
10.1016/j.vacuum.2010.01.055
◽
2010
◽
Vol 84
(9)
◽
pp. 1159-1170
◽
Cited By ~ 95
Author(s):
G. Greczynski
◽
L. Hultman
Keyword(s):
Magnetron Sputtering
◽
Mass Spectroscopy
◽
High Power
◽
Ion Flux
◽
Spectroscopy Studies
◽
Time And Energy
◽
Pulsed Magnetron
Download Full-text
System for time-resolved laser absorption spectroscopy and its application to high-power impulse magnetron sputtering
Review of Scientific Instruments
◽
10.1063/1.4975175
◽
2017
◽
Vol 88
(2)
◽
pp. 023105
Author(s):
P. Adámek
◽
J. Olejníček
◽
Z. Hubička
◽
M. Čada
◽
Š. Kment
◽
...
Keyword(s):
Magnetron Sputtering
◽
Absorption Spectroscopy
◽
High Power
◽
Laser Absorption Spectroscopy
◽
Time Resolved
◽
Laser Absorption
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Influence of ionisation zone motion in high power impulse magnetron sputtering on angular ion flux and NbOxfilm growth
Plasma Sources Science and Technology
◽
10.1088/0963-0252/25/1/015022
◽
2016
◽
Vol 25
(1)
◽
pp. 015022
◽
Cited By ~ 20
Author(s):
Robert Franz
◽
César Clavero
◽
Jonathan Kolbeck
◽
André Anders
Keyword(s):
Magnetron Sputtering
◽
High Power
◽
Ion Flux
Download Full-text
Time-Resolved Diagnostics of Dual High Power Impulse Magnetron Sputtering With Pulse Delays of 15 µs and 500 µs
Contributions to Plasma Physics
◽
10.1002/ctpp.201000065
◽
2011
◽
Vol 51
(2-3)
◽
pp. 237-245
◽
Cited By ~ 23
Author(s):
V. Stranak
◽
S. Drache
◽
M. Cada
◽
Z. Hubicka
◽
M. Tichy
◽
...
Keyword(s):
Magnetron Sputtering
◽
High Power
◽
Time Resolved
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Advanced Nanocluster Ion Source Based on High-Power Impulse Magnetron Sputtering and Time-Resolved Measurements of Nanocluster Formation
The Journal of Physical Chemistry A
◽
10.1021/jp406521v
◽
2013
◽
Vol 117
(40)
◽
pp. 10211-10217
◽
Cited By ~ 44
Author(s):
Chuhang Zhang
◽
Hironori Tsunoyama
◽
Hiroki Akatsuka
◽
Hiroki Sekiya
◽
Tomomi Nagase
◽
...
Keyword(s):
Magnetron Sputtering
◽
High Power
◽
Ion Source
◽
Time Resolved
◽
Time Resolved Measurements
Download Full-text
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