Time-Resolved Diagnostics of Dual High Power Impulse Magnetron Sputtering With Pulse Delays of 15 µs and 500 µs
2011 ◽
Vol 51
(2-3)
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pp. 237-245
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2014 ◽
Vol 42
(10)
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pp. 2818-2819
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Keyword(s):
2013 ◽
Vol 117
(40)
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pp. 10211-10217
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Keyword(s):
2014 ◽
Vol 32
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pp. 1460337
Keyword(s):
2013 ◽
Vol 46
(49)
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pp. 495201
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Keyword(s):