Chemical mechanical polishing mechanisms for gallium nitride: Quantum chemical molecular dynamics simulations
2016 ◽
Vol 8
(18)
◽
pp. 11830-11841
◽
2013 ◽
Vol 2013.5
(0)
◽
pp. 65-66
2013 ◽
Vol 2013.5
(0)
◽
pp. 119-120
2016 ◽
Vol 18
(11)
◽
pp. 7808-7819
◽
1999 ◽
Vol 7
(1)
◽
pp. 43-58
◽