Particle Adhesion Force Distributions on Rough Surfaces

Langmuir ◽  
2004 ◽  
Vol 20 (13) ◽  
pp. 5298-5303 ◽  
Author(s):  
M. Götzinger ◽  
W. Peukert
Keyword(s):  
Adhesion Force ◽  
Rough Surfaces ◽  
Particle Adhesion ◽  
Particle Adhesion Force

Frictional behavior and particle adhesion of abrasive particles during Cu CMP

2005 ◽  
Vol 867 ◽  
Author(s):  
Yi-Koan Hong ◽  
Ja-Hyung Han ◽  
Jae-Hoon Song ◽  
Jin-Goo Park
Keyword(s):  
Citric Acid ◽  
Adhesion Force ◽  
Particle Adhesion ◽  
Friction Behavior ◽  
Abrasive Particles ◽  
Frictional Behavior ◽  
Cu Cmp ◽  
Particle Adhesion Force ◽  
Wafer Surfaces ◽  
Citrate Ions

AbstractThe friction behavior and adhesion of abrasive particles were experimentally investigated during Cu CMP process. The highest particle adhesion force was measured in alumina slurry without citric acid. However, the alumina slurry with addition of citric acid had the lowest particle adhesion due to the adsorption of citrate ions on the alumina surfaces. While citrate ions could be easily adsorbed on alumina particles, silica particle showed the least effect on adsorption in citric acid solutions. The magnitude of adsorptions of citrate ions on the particle surfaces had significant effect on frictional behavior as well as adhesion force. Higher particle adhesion force resulted in higher friction, particle contamination and scratches in CMP process. It indicates that the magnitudes of particle adhesions on wafer surfaces in slurries can be directly related to the frictional behavior during CMP process.

scholarly journals Prediction of Inter-particle Adhesion Force from Surface Energy and Surface Roughness

2011 ◽  
Vol 25 (4-5) ◽  
pp. 367-384 ◽  
Author(s):  
Laila J. Jallo ◽  
Yuhua Chen ◽  
James Bowen ◽  
Frank Etzler ◽  
Rajesh Dave
Keyword(s):  
Surface Roughness ◽  
Surface Energy ◽  
Adhesion Force ◽  
Particle Adhesion ◽  
Particle Adhesion Force

scholarly journals Drop test: A new method to measure the particle adhesion force

2014 ◽  
Vol 264 ◽  
pp. 236-241 ◽  
Author(s):  
U. Zafar ◽  
C. Hare ◽  
A. Hassanpour ◽  
M. Ghadiri
Keyword(s):  
Adhesion Force ◽  
Drop Test ◽  
New Method ◽  
Particle Adhesion ◽  
Particle Adhesion Force

scholarly journals Glass-particle adhesion-force-distribution on clean (laboratory) and contaminated (outdoor) surfaces

2018 ◽  
Vol 123 ◽  
pp. 231-244 ◽  
Author(s):  
Matthew N. Rush ◽  
Sara Brambilla ◽  
Scott Speckart ◽  
Gabriel A. Montaño ◽  
Michael J. Brown
Keyword(s):  
Adhesion Force ◽  
Glass Particle ◽  
Force Distribution ◽  
Particle Adhesion ◽  
Particle Adhesion Force ◽  
Clean Laboratory

Capillary Forces Described by Effective Contact Angle Distributions via Simulations of the Centrifuge Technique

MRS Advances ◽  
2016 ◽  
Vol 1 (31) ◽  
pp. 2237-2245
Author(s):  
Myles Thomas ◽  
Elizabeth Krenek ◽  
Stephen Beaudoin
Keyword(s):  
Surface Roughness ◽  
Contact Angle ◽  
Smooth Surface ◽  
Adhesion Force ◽  
Capillary Forces ◽  
Angle Distribution ◽  
Particle Adhesion ◽  
Multiple Factors ◽  
Effective Contact ◽  
Condensed Moisture

ABSTRACTUnderstanding particle adhesion is vital to any industry where particulate systems are involved. There are multiple factors that affect the strength of the adhesion force, including the physical properties of the interacting materials and the system conditions. Surface roughness on the particles and the surfaces to which they adhere, including roughness at the nanoscale, is critically important to the adhesion force. The focus of this work is on the capillary force that dominates the adhesion whenever condensed moisture is present. Theoretical capillary forces were calculated for smooth particles adhered to smooth and rough surfaces. Simulations of the classical centrifuge technique used to describe particle adhesion to surfaces were performed based on these forces. A model was developed to describe the adhesion of the particles to the rough surface in terms of the adhesion to a smooth surface and an ‘effective’ contact angle distribution.

Developments for Physical Cleaning Sample with High Adhesion Force Particles and Direct Measurement of its Removal Force

2016 ◽  
Vol 255 ◽  
pp. 201-206 ◽  
Author(s):  
Emu Tokuda ◽  
Toshiyuki Sanada ◽  
Futoshi Iwata ◽  
Chikako Takato ◽  
Hirokuni Hiyama ◽  
...  
Keyword(s):  
Particle Size ◽  
Direct Measurement ◽  
Adhesion Force ◽  
Removal Rate ◽  
Particle Removal ◽  
Cleaning Performance ◽  
High Adhesion ◽  
Particle Adhesion Force ◽  
Particle Sample ◽  
Measured Particle

We quantitatively evaluate the wet cleaning performance of particle cotamination. We made particle sample which endure the wet cleaning and measured particle adhesion force by self-sensitive cantilever. The advantage of this method is that performed in both air and water. As a result, there were no significant differences between the air and water condition and the influence of particle size were dominant. Using this sample, we demonstrated particle removal rate of droplets impacts and PVA brush.

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