scholarly journals Measurement of particle adhesion force and effective contact radius via centrifuge equipped with horizontal and vertical substrates

2022 ◽  
pp. 117103
Author(s):  
Yasuhiro Shimada ◽  
Motohiro Tsubota ◽  
Shuji Matsusaka
MRS Advances ◽  
2016 ◽  
Vol 1 (31) ◽  
pp. 2237-2245
Author(s):  
Myles Thomas ◽  
Elizabeth Krenek ◽  
Stephen Beaudoin

ABSTRACTUnderstanding particle adhesion is vital to any industry where particulate systems are involved. There are multiple factors that affect the strength of the adhesion force, including the physical properties of the interacting materials and the system conditions. Surface roughness on the particles and the surfaces to which they adhere, including roughness at the nanoscale, is critically important to the adhesion force. The focus of this work is on the capillary force that dominates the adhesion whenever condensed moisture is present. Theoretical capillary forces were calculated for smooth particles adhered to smooth and rough surfaces. Simulations of the classical centrifuge technique used to describe particle adhesion to surfaces were performed based on these forces. A model was developed to describe the adhesion of the particles to the rough surface in terms of the adhesion to a smooth surface and an ‘effective’ contact angle distribution.


2005 ◽  
Vol 867 ◽  
Author(s):  
Yi-Koan Hong ◽  
Ja-Hyung Han ◽  
Jae-Hoon Song ◽  
Jin-Goo Park

AbstractThe friction behavior and adhesion of abrasive particles were experimentally investigated during Cu CMP process. The highest particle adhesion force was measured in alumina slurry without citric acid. However, the alumina slurry with addition of citric acid had the lowest particle adhesion due to the adsorption of citrate ions on the alumina surfaces. While citrate ions could be easily adsorbed on alumina particles, silica particle showed the least effect on adsorption in citric acid solutions. The magnitude of adsorptions of citrate ions on the particle surfaces had significant effect on frictional behavior as well as adhesion force. Higher particle adhesion force resulted in higher friction, particle contamination and scratches in CMP process. It indicates that the magnitudes of particle adhesions on wafer surfaces in slurries can be directly related to the frictional behavior during CMP process.


2011 ◽  
Vol 25 (4-5) ◽  
pp. 367-384 ◽  
Author(s):  
Laila J. Jallo ◽  
Yuhua Chen ◽  
James Bowen ◽  
Frank Etzler ◽  
Rajesh Dave

Langmuir ◽  
2004 ◽  
Vol 20 (13) ◽  
pp. 5298-5303 ◽  
Author(s):  
M. Götzinger ◽  
W. Peukert

2014 ◽  
Vol 264 ◽  
pp. 236-241 ◽  
Author(s):  
U. Zafar ◽  
C. Hare ◽  
A. Hassanpour ◽  
M. Ghadiri

2018 ◽  
Vol 123 ◽  
pp. 231-244 ◽  
Author(s):  
Matthew N. Rush ◽  
Sara Brambilla ◽  
Scott Speckart ◽  
Gabriel A. Montaño ◽  
Michael J. Brown

Author(s):  
Kuahai Yu ◽  
Danesh Tafti

Sand ingestion and deposition in gas turbine engine components can lead to several operational hazards. This paper discusses a physics based model for modeling the impact and deposition of sand particles. The collision model divides the impact process into three stages, the elastic stage, the elastic-plastic stage, and full plastic stage. The recovery stage is assumed to be fully elastic. The contact force, contact radius and work of contact force are conformed to the Hertzian theory, using “Young’s modulus similarity” rule to predict the recovery displacement. The adhesion loss in the recovery stage is considered using Dunn’s model, which describes the adhesion force as an idealized line force with the contact radius. The validation case of steel spherical particle impact on a glass surface with the maximum Stokes number of 10000, shows that the adhesion model with elastoplastic impact model describes the experimental result well. When the Stokes number is less than 12, the particle deposits on the surface. Sand properties are characterized by size and temperature dependencies. Model predictions for particle sizes ranging from 0.5 to 50 micron, impact velocities up to 80 m/s, and temperatures above 1300 K are given and discussed. It is shown that both size and temperature have an effect on the deposition characteristics.


2016 ◽  
Vol 255 ◽  
pp. 201-206 ◽  
Author(s):  
Emu Tokuda ◽  
Toshiyuki Sanada ◽  
Futoshi Iwata ◽  
Chikako Takato ◽  
Hirokuni Hiyama ◽  
...  

We quantitatively evaluate the wet cleaning performance of particle cotamination. We made particle sample which endure the wet cleaning and measured particle adhesion force by self-sensitive cantilever. The advantage of this method is that performed in both air and water. As a result, there were no significant differences between the air and water condition and the influence of particle size were dominant. Using this sample, we demonstrated particle removal rate of droplets impacts and PVA brush.


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