scholarly journals Dynamics of laser produced plasma from foam targets for future nanolithography devices and X-ray sources

2021 ◽  
Vol 11 (1) ◽  
Author(s):  
Yaoxing Wu ◽  
Girik Jain ◽  
Tatyana Sizyuk ◽  
Xinbing Wang ◽  
Ahmed Hassanein

AbstractFoam targets are expected to be more efficient candidates than solid targets for laser produced plasma (LPP) for extreme ultraviolet (EUV) and X-ray radiation sources due to the expected plasma conditions that can be optimized regarding plasma opacities, volumetrics heating effects, and the produced ions debris characteristics. In this paper, a comparison of ion dynamics between low-density foam and solid Ni plasma was systematically investigated at CMUXE. The foam Ni target (density 0.6 g/cm3) and solid Ni target (density 8.9 g/cm3) were irradiated with 1064 nm Nd:YAG laser in vacuum. A Faraday cup (FC) was used to record the ion flux and time-of-flight (TOF) signals. A lower and wider TOF signal was observed for foam Ni plasma on the time scale. The average ion energy and peak of the TOF signal of solid Ni plasma were much higher than that of the foam Ni plasma. However, the total charge values between foam and solid Ni plasma were comparable indicating a more volumetric absorption of laser energy for foam Ni. The average ion energy and peak of the TOF signal of solid Ni showed a stronger angular and laser energy dependence than that of foam Ni. The plume shape of the solid Ni plasma appeared as an oblong ellipse at each time, while that of foam Ni plasma tended to be more circular, especially at early times. The results of mass ablation rate were consistent with the FC signals and showed a more intense plasma shielding for solid Ni.

2021 ◽  
Author(s):  
Yaoxing Wu ◽  
Girik Jain ◽  
Tatyana Sizyuk ◽  
Xinbing Wang ◽  
Ahmed Hassanein

Abstract Foam targets are expected to be more efficient candidates than solid targets for laser produced plasma (LPP) for extreme ultraviolet (EUV) and x-ray radiation sources due to the expected plasma conditions that can be optimized regarding plasma opacities, volumetrics heating effects, and the produced ions debris characteristics. In this paper, a comparison of ion dynamics between low-density foam and solid Ni plasma was systematically investigated at CMUXE. The foam Ni target (density 0.6 g/cm3) and solid Ni target (density 8.9 g/cm3) were irradiated with 1064 nm Nd:YAG laser in vacuum. A Faraday cup (FC) was used to record the ion flux and time-of-flight (TOF) signals. A lower and wider TOF signal was observed for foam Ni plasma on the time scale. The average ion energy and peak of the TOF signal of solid Ni plasma were much higher than that of the foam Ni plasma. However, the total charge values between foam and solid Ni plasma were comparable indicating a more volumetric absorption of laser energy for foam Ni. The average ion energy and peak of the TOF signal of solid Ni showed a stronger angular and laser energy dependence than that of foam Ni. The plume shape of the solid Ni plasma appeared as an oblong ellipse at each time, while that of foam Ni plasma tended to be more circular, especially at early times. The results of mass ablation rate were consistent with the FC signals and showed a more intense plasma shielding for solid Ni.


2015 ◽  
Vol 08 (05) ◽  
pp. 1550018 ◽  
Author(s):  
Shupeng Liu ◽  
Na Chen ◽  
Fufei Pang ◽  
Zhengyi Chen ◽  
Tingyun Wang

Purpose: This work focused on the investigation the hyperthermia performance of the carbon-coated magnetic particles (CCMPs) in laser-induced hyperthermia. Materials and methods: We prepared CCMPs using the organic carbonization method, and then characterized them with transmission electron microscopy (TEM), ultraviolet-visible (UV-Vis) spectrophotometry, vibrating sample magnetometer (VSM) and X-ray diffraction (XRD). In order to evaluate their performance in hyperthermia, the CCMPs were tested in laser-induced thermal therapy (LITT) experiments, in which we employed a fully distributed fiber Bragg grating (FBG) sensor to profile the tissue's dynamic temperature change under laser irradiation in real time. Results: The sizes of prepared CCMPs were about several micrometers, and the LITT results show that the tissue injected with the CCMPs absorbed more laser energy, and its temperature increased faster than the contrast tissue without CCMPs. Conclusions: The CCMPs may be of great help in hyperthermia applications.


2021 ◽  
Vol 127 (4) ◽  
Author(s):  
S. Skruszewicz ◽  
S. Fuchs ◽  
J. J. Abel ◽  
J. Nathanael ◽  
J. Reinhard ◽  
...  

AbstractWe present an overview of recent results on optical coherence tomography with the use of extreme ultraviolet and soft X-ray radiation (XCT). XCT is a cross-sectional imaging method that has emerged as a derivative of optical coherence tomography (OCT). In contrast to OCT, which typically uses near-infrared light, XCT utilizes broad bandwidth extreme ultraviolet (XUV) and soft X-ray (SXR) radiation (Fuchs et al in Sci Rep 6:20658, 2016). As in OCT, XCT’s axial resolution only scales with the coherence length of the light source. Thus, an axial resolution down to the nanometer range can be achieved. This is an improvement of up to three orders of magnitude in comparison to OCT. XCT measures the reflected spectrum in a common-path interferometric setup to retrieve the axial structure of nanometer-sized samples. The technique has been demonstrated with broad bandwidth XUV/SXR radiation from synchrotron facilities and recently with compact laboratory-based laser-driven sources. Axial resolutions down to 2.2 nm have been achieved experimentally. XCT has potential applications in three-dimensional imaging of silicon-based semiconductors, lithography masks, and layered structures like XUV mirrors and solar cells.


2021 ◽  
Vol 7 (21) ◽  
pp. eabe2265
Author(s):  
Tobias Helk ◽  
Emma Berger ◽  
Sasawat Jamnuch ◽  
Lars Hoffmann ◽  
Adeline Kabacinski ◽  
...  

The lack of available table-top extreme ultraviolet (XUV) sources with high enough fluxes and coherence properties has limited the availability of nonlinear XUV and x-ray spectroscopies to free-electron lasers (FELs). Here, we demonstrate second harmonic generation (SHG) on a table-top XUV source by observing SHG near the Ti M2,3 edge with a high-harmonic seeded soft x-ray laser. Furthermore, this experiment represents the first SHG experiment in the XUV. First-principles electronic structure calculations suggest the surface specificity and separate the observed signal into its resonant and nonresonant contributions. The realization of XUV-SHG on a table-top source opens up more accessible opportunities for the study of element-specific dynamics in multicomponent systems where surface, interfacial, and bulk-phase asymmetries play a driving role.


1984 ◽  
Vol 86 ◽  
pp. 215-218
Author(s):  
P. Mandelbaum ◽  
M. Klapisch ◽  
A. Krasnitz ◽  
A. Zigler

X-ray spectra of highly ionized atoms (Tm to Pt) emitted from Laser produced plasma are characterized by the simple structure given by resonant transitions of the Nil-like ions, accompanied by the more complex pattern of satellite transitions emitted by ions in the neighbouring states of ionization. An analysis of these structures has been given recently for the satellites of the 3d10 − 3d94p[l] and of the 3p63dl0 − 3p53d104s, 4d[2] transitions of the Nil-like inns. However, most of the radiation emitted in this spectral range [4–10Å] concentrate in a wide, rather structureless satellite feature in the long wavelength side of the 3d10 −3d94f Ni-I like transition, on which some lines are superimposed. Line identification has been achieved successfully with the methods of [1], [2] and will be published separately. In this communication, we deal only with the pseudocontinuum.


2003 ◽  
Vol 345 (1) ◽  
pp. 49-61 ◽  
Author(s):  
Peter J. Wheatley ◽  
Christopher W. Mauche ◽  
Janet A. Mattei
Keyword(s):  

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