Langmuir probe potential measurements of an inductively coupled plasma: effect of radiofrequency and shield between load coil and plasma

1998 ◽  
Vol 13 (8) ◽  
pp. 715-720 ◽  
Author(s):  
Chang J. Park ◽  
Seung M. Noh
Keyword(s):  
Langmuir Probe ◽  
Inductively Coupled Plasma ◽  
Inductively Coupled ◽  
Probe Potential ◽  
Plasma Effect

Deposition of SiOx coatings by inductively coupled plasma: Effect of pulsed hexamethyldisiloxan flow

2018 ◽  
Vol 15 (4) ◽  
pp. 1700186 ◽  
Author(s):  
Markus Brochhagen ◽  
Sascha Chur ◽  
Vincent Layes ◽  
Marc Böke ◽  
Jan Benedikt
Keyword(s):  
Inductively Coupled Plasma ◽  
Inductively Coupled ◽  
Plasma Effect

Etching Characteristics and Mechanism of SiNx Films for Nano-Devices in CH2F2/O2/Ar Inductively Coupled Plasma: Effect of O2 Mixing Ratio

2014 ◽  
Vol 14 (12) ◽  
pp. 9534-9540 ◽  
Author(s):  
Jinyoung Son ◽  
Alexander Efremov ◽  
Sun Jin Yun ◽  
Geun Young Yeom ◽  
Kwang-Ho Kwon
Keyword(s):  
Inductively Coupled Plasma ◽  
Mixing Ratio ◽  
Inductively Coupled ◽  
Plasma Effect

The Experimental Research on Uniformity of Argon Inductively Coupled Plasma at Different Cylinder Heights

2013 ◽  
Vol 724-725 ◽  
pp. 686-691
Author(s):  
Song Bai Wang ◽  
Xian Hui Zhang ◽  
Hong Zhe Wang ◽  
Lin Ying Liu ◽  
Ren Wu Zhou ◽  
...  
Keyword(s):  
Langmuir Probe ◽  
Inductively Coupled Plasma ◽  
Negative Ions ◽  
Plasma Sheath ◽  
Injection System ◽  
Dynamic Processes ◽  
Electronic Density ◽  
Inductively Coupled ◽  
Beam Injection ◽  
Two Factors

We report on the characteristics of argon inductively coupled plasma (ICP) for the ITER neutral beam injection system. In argon ICP, it was found by using Langmuir probe that the radial distribution of electronic density (Ne) was uniform while the radial distributions of both electron temperature (kTe ) and electric potential (VP) were non-uniform. The former depend on two factors: the variation of Ne was small, and the value of Ne was very large. The latter is owing to the generation and disappearance of the negative ions in the ICP, where the additional dynamic processes produce the instability. In addition, both kTe and VP profiles were very similar at the cylinder height H=14 cm, which proves the plasma sheath theory to some extent. Finally, both kTe and VP began flatter with the reduction of the cylinder height, which is owing to the decrease of the negative ions in the ICP.

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