Role of hydrogen in the chemical vapor deposition growth of MoS2 atomic layers
Keyword(s):
In the two-step chemical vapor deposition growth of MoS2, hydrogen plays crucial roles as an inhibitor of the thermal-induced etching effect and as a promoter of desulfurization and oxidation of the obtained MoSx films.
2014 ◽
Vol 136
(8)
◽
pp. 3040-3047
◽
2015 ◽
Vol 620
◽
pp. 87-90
◽
Keyword(s):