Tailoring the surface properties of cerium oxide nanoabrasives through morphology control for glass CMP

RSC Advances ◽  
2015 ◽  
Vol 5 (102) ◽  
pp. 84056-84065 ◽  
Author(s):  
Thadathil S. Sreeremya ◽  
Malini Prabhakaran ◽  
Swapankumar Ghosh
Keyword(s):  
Cerium Oxide ◽  
Surface Properties ◽  
Chemical Mechanical Planarization ◽  
Morphology Control

Ceria nanostructures synthesized through simple synthetic protocols showed morphology dependence in the chemical mechanical planarization of glass by virtue of their diverse surface properties.

Nanocrystalline cerium oxide for catalytic degradation of paraoxon methyl: Influence of CeO2 surface properties

2021 ◽  
pp. 106229
Author(s):  
Jakub Ederer ◽  
Pavel Janoš ◽  
Martin Šťastný ◽  
Jiří Henych ◽  
Karel Ederer ◽  
...  
Keyword(s):  
Cerium Oxide ◽  
Surface Properties ◽  
Catalytic Degradation

scholarly journals Nanoscale Cerium Oxide: Synthesis, Biocatalytic Mechanism, and Applications

Catalysts ◽  
2021 ◽  
Vol 11 (9) ◽  
pp. 1123
Author(s):  
Guangchun Song ◽  
Nan Cheng ◽  
Junjie Zhang ◽  
Huixian Huang ◽  
Yanfang Yuan ◽  
...  
Keyword(s):  
Cerium Oxide ◽  
Surface Properties ◽  
Future Development ◽  
Catalytic Mechanism ◽  
Catalytic Performance ◽  
Synthesis Methods ◽  
Activity Regulation ◽  
Inorganic Molecules ◽  
Excellent Catalytic Performance ◽  
Unique Surface

Nanoscale cerium oxide has excellent catalytic performance due to its unique surface properties and has very important applications in various fields. In this paper, the synthesis methods, catalytic mechanism and activity regulation of nanoscale cerium oxide in recent years are reviewed. Secondly, the application of cerium oxide in the detection of organic and inorganic molecules is summarized, and its latest progress and applications in antibacterial, antioxidant and anticancer are discussed. Finally, the future development prospect of nanoscale cerium oxide is summarized and prospected.

CeO2 Particles for Chemical Mechanical Planarization

2003 ◽  
Vol 767 ◽  
Author(s):  
Xiandong Feng ◽  
Yie-Shein. Her ◽  
W. Linda. ◽  
Jackie Davis ◽  
Eric Oswald ◽  
...  
Keyword(s):  
Cerium Oxide ◽  
Surface Quality ◽  
Temperature Effects ◽  
Size Range ◽  
Chemical Mechanical Planarization ◽  
Particle Sizes ◽  
Additive Concentration ◽  
Solution Ph ◽  
Size Growth ◽  
Oxide Particles

AbstractNano-sized cerium oxide particles in the size range of 5 to 500nm have been synthesized for use in chemical mechanical planarization (CMP) applications. The CeO2 particles were prepared using cerium nitrate salts with bases such as ammonium water, ethylamine, or other alkylamine /polyalkylamine compounds. Other additives such as urea can be added to affect crystallization and size growth of the final particles. The particle sizes of the resulting CeO2 particles depend on the initial concentrations of cerium salts, additive concentration, and solution pH. Reaction duration seems to have little effect on CeO2 particle sizes. Temperature effects on size were moderate. These CeO2 particles showed excellent surface quality and desirable polishing rate during CMP tests.

Effect of Cerium Oxide Particle Sizes in Oxide Chemical Mechanical Planarization

2009 ◽  
Vol 12 (6) ◽  
pp. H191 ◽  
Author(s):  
Yasa Sampurno ◽  
Fransisca Sudargho ◽  
Yun Zhuang ◽  
Toranosuke Ashizawa ◽  
Hiroyuki Morishima ◽  
...  
Keyword(s):  
Cerium Oxide ◽  
Chemical Mechanical Planarization ◽  
Oxide Particle ◽  
Particle Sizes
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