CeO2 Particles for Chemical Mechanical Planarization

2003 ◽  
Vol 767 ◽  
Author(s):  
Xiandong Feng ◽  
Yie-Shein. Her ◽  
W. Linda. ◽  
Jackie Davis ◽  
Eric Oswald ◽  
...  
Keyword(s):  
Cerium Oxide ◽  
Surface Quality ◽  
Temperature Effects ◽  
Size Range ◽  
Chemical Mechanical Planarization ◽  
Particle Sizes ◽  
Additive Concentration ◽  
Solution Ph ◽  
Size Growth ◽  
Oxide Particles

AbstractNano-sized cerium oxide particles in the size range of 5 to 500nm have been synthesized for use in chemical mechanical planarization (CMP) applications. The CeO2 particles were prepared using cerium nitrate salts with bases such as ammonium water, ethylamine, or other alkylamine /polyalkylamine compounds. Other additives such as urea can be added to affect crystallization and size growth of the final particles. The particle sizes of the resulting CeO2 particles depend on the initial concentrations of cerium salts, additive concentration, and solution pH. Reaction duration seems to have little effect on CeO2 particle sizes. Temperature effects on size were moderate. These CeO2 particles showed excellent surface quality and desirable polishing rate during CMP tests.

Effect of Cerium Oxide Particle Sizes in Oxide Chemical Mechanical Planarization

2009 ◽  
Vol 12 (6) ◽  
pp. H191 ◽  
Author(s):  
Yasa Sampurno ◽  
Fransisca Sudargho ◽  
Yun Zhuang ◽  
Toranosuke Ashizawa ◽  
Hiroyuki Morishima ◽  
...  
Keyword(s):  
Cerium Oxide ◽  
Chemical Mechanical Planarization ◽  
Oxide Particle ◽  
Particle Sizes

Characterization of carbides in M50NiL

1991 ◽  
Vol 49 ◽  
pp. 606-607
Author(s):  
L. S. Lin ◽  
K. P. Gumz ◽  
A. V. Karg ◽  
C. C. Law
Keyword(s):  
Temperature Effects ◽  
Base Composition ◽  
Lattice Parameter ◽  
Control Surface ◽  
Carbide Formation ◽  
Particle Sizes ◽  
Low Carbon ◽  
Fee Structure ◽  
Heat Treated

Carbon and temperature effects on carbide formation in the carburized zone of M50NiL are of great importance because they can be used to control surface properties of bearings. A series of homogeneous alloys (with M50NiL as base composition) containing various levels of carbon in the range of 0.15% to 1.5% (in wt.%) and heat treated at temperatures between 650°C to 1100°C were selected for characterizations. Eleven samples were chosen for carbide characterization and chemical analysis and their identifications are listed in Table 1.Five different carbides consisting of M6C, M2C, M7C3 and M23C6 were found in all eleven samples examined as shown in Table 1. M6C carbides (with least carbon) were found to be the major carbide in low carbon alloys (<0.3% C) and their amounts decreased as the carbon content increased. In sample C (0.3% C), most particles (95%) encountered were M6C carbide with a particle sizes range between 0.05 to 0.25 um. The M6C carbide are enriched in both Mo and Fe and have a fee structure with lattice parameter a=1.105 nm (Figure 1).

A Proof for the Possibility of Ce-Oxide from CMP Residuals in Si-Wafers by Analytical TEM

2012 ◽  
Author(s):  
Wayne Zhao ◽  
Liem Do Thanh ◽  
Michael Gribelyuk ◽  
Mary-Ann Zaitz ◽  
Wing Lai
Keyword(s):  
Technology Development ◽  
Early Stage ◽  
Chemical Mechanical Planarization ◽  
Particle Cluster ◽  
Limited Region ◽  
Physical Evidence ◽  
Analytical Tem ◽  
Transmission Electron ◽  
Oxide Particles

Abstract Inclusion of cerium (Ce) oxide particles as an abrasive into chemical mechanical planarization (CMP) slurries has become popular for wafer fabs below the 45nm technology node due to better polishing quality and improved CMP selectivity. Transmission electron microscopy (TEM) has difficulties finding and identifying Ce-oxide residuals due to the limited region of analysis unless dedicated efforts to search for them are employed. This article presents a case study that proved the concept in which physical evidence of Ce-rich particles was directly identified by analytical TEM during a CMP tool qualification in the early stage of 20nm node technology development. This justifies the need to setup in-fab monitoring for trace amounts of CMP residuals in Si-based wafer foundries. The fact that Cr resided right above the Ce-O particle cluster, further proved that the Ce-O particles were from the wafer and not introduced during the sample preparation.

Toxicity, uptake, and accumulation of nano and bulk cerium oxide particles in Artemia salina

2017 ◽  
Vol 24 (31) ◽  
pp. 24187-24200 ◽  
Author(s):  
Einstein Mariya David Sugantharaj David ◽  
Madhav Madurantakam Royam ◽  
Suresh Kumar Rajamani Sekar ◽  
Bhuvaneshwari Manivannan ◽  
Swathy Jalaja Soman ◽  
...  
Keyword(s):  
Cerium Oxide ◽  
Artemia Salina ◽  
Oxide Particles

scholarly journals Characterization of cellulose acetate based on empty fruit bunches and dried jackfruit leaves as replacement candidates for microbeads

2018 ◽  
Vol 67 ◽  
pp. 04024
Author(s):  
Dewi Tristantini ◽  
Andersen Yunan
Keyword(s):  
Water Absorption ◽  
Cellulose Acetate ◽  
Size Range ◽  
Acid Anhydride ◽  
Particle Sizes ◽  
Oil Absorption ◽  
Empty Fruit Bunches ◽  
Alternative Sources ◽  
Beauty Products

Scrubs used in other skin care and beauty products usually contain tiny fine grains of synthetic polymer called microbeads that usually pose threats to marine environment. Empty Fruit Bunches (EFB) and Dried Jackfruit Leaves (DJL) as organic and environmentally friendly can be alternative sources for polymer microbeads. Cellulose acetate is prepared by acetylation reaction between cellulose and acetic acid anhydride. Cellulose from EFB and DJL was extracted through a process of delignification with 12% NaOH treatment for EFB and 10% for DJL to obtain maximum yields of 38.964% and 14.449% respectively, followed by bleaching using peroxide 10 %. The formed cellulose acetate with 88.5% and 79.7% yield respectively is then filtered using a sieve mash 60 and 80 to obtain particle sizes ranging that are in the microbeads size range. The density test resulting in 0.73 g/cm3 and 0.52 g/cm3 respectively for EFB and DJL. Then, physical characteristic test was done by water and oil absorption test with variation at 25°C and 40°C. EFB at 25°C and 40°C shows water absorption at 23.39% and 26.09% and oil absorption at 7.59% and 13.95%. DJL at 25°C and 40°C shows water absorption at 22.56% and 27.32% and oil absorption at 13.09% and 15.36%.

Influence of abrasive morphology and size dispersity of Cu barrier metal slurry on removal rates and wafer surface quality in chemical mechanical planarization

2020 ◽  
Vol 232 ◽  
pp. 111417 ◽  
Author(s):  
Seungchul Hong ◽  
Deoksu Han ◽  
Jangkuk Kwon ◽  
Sung Jun Kim ◽  
Seong Jae Lee ◽  
...  
Keyword(s):  
Surface Quality ◽  
Chemical Mechanical Planarization ◽  
Wafer Surface ◽  
Removal Rates ◽  
Barrier Metal

scholarly journals Frac sand crushing characteristics and morphology changes under high compressive stress and implications for sand pack permeability

2016 ◽  
Vol 53 (9) ◽  
pp. 1412-1423 ◽  
Author(s):  
Wenbo Zheng ◽  
Dwayne Tannant
Keyword(s):  
Particle Shape ◽  
Void Ratio ◽  
Size Range ◽  
Particle Sizes ◽  
Shale Formations ◽  
Closure Stress ◽  
Compressive Stresses ◽  
Spherical Grains ◽  
Particle Shapes ◽  
Quartz Grains

Sand consisting of round quartz grains is widely used as a proppant during hydraulic fracturing to produce natural gas from tight shale formations. This paper presents results from sand characterization and crushing tests on Jordan Formation frac sand. It includes an assessment of grain-size reduction, changes in particle shape, and reduction in void ratio. It also examines the implications for permeability reduction through a sand pack caused by the closure stress on a hydraulic fracture. The sand from two size ranges (0.6 to 0.71 mm and 0.5 to 0.6 mm) was tested dry under applied compressive stresses of up to 40 MPa in a crushing cup. The overall sand pack stress–strain response becomes softer as grains are crushed. The particle shape shifts from nearly spherical grains to diametrically split grains and then to small elongated and angular fragments for the smaller particle sizes. The permeability of the sand pack reduces by more than 40% at a 20 MPa stress, which is mainly caused by a decrease in void ratio due to compaction. The permeability reduces by over 70% at a 40 MPa stress, which is primarily caused by void ratio decrease, reduction in particle size, and a shift away from spherical particle shapes. Compared to the ISO 13503-2 standard where only the sand crushing percentage after crushing tests is measured, this paper demonstrates that more information can be extracted from sand crushing tests and that sand pack permeability can be assessed to optimize frac sand selection. A sand with a larger size range has a higher crushing percentage, but is more permeable compared to a sand with a smaller size range. This further indicates that frac sand selection based only on sand crushing percentage is not sufficient to achieve better sand pack permeability.

High-Rate Formation of Nano-Scale Alumina Particles

1991 ◽  
Vol 249 ◽  
Author(s):  
A. Kilian ◽  
L. Reinhart ◽  
A. Davis ◽  
T.F. Morse ◽  
D.C. Paine
Keyword(s):  
Size Range ◽  
High Rate ◽  
Practical Application ◽  
New Approach ◽  
Monodispersed Particles ◽  
Nano Scale ◽  
Alumina Particles ◽  
Large Production ◽  
Oxide Particles ◽  
The Ideal

ABSTRACTIn this paper we report a new approach to the problem of high rate formation of nanophase powders. In our experiments we were able to make aluminum oxide particles in the size range from 5 to 140 nm (peaking sharply at 35 nm) at a rate of 3 g/min. The starting material was a mixture of aluminum-tri-sec-butoxide and sec-butanol. An aerosol was made from this solution and subsequently burned in a special torch, described below. The resulting particles were spherical and no necked regions were observable between them. In a practical application, our technique allows a large production rate while still approaching the ideal of nano-scale monodispersed particles. The work was extended to the formation of zirconium oxide particles with quite similar results in the size distribution.

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