Hydrogen incorporation effect in phosphorus-doped p-type ZnO thin films grown by radio-frequency magnetron sputtering
Keyword(s):
P Type
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We report on the influence of hydrogen incorporation on the conductivity of phosphorous (P) doped ZnO thin films grown by using radio-frequency (RF) magnetron sputtering.
1993 ◽
Vol 11
(6)
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pp. 2975-2979
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2008 ◽
Vol 464
(1-2)
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pp. 89-94
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2013 ◽
Vol 359
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pp. 69-72
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