Effect of pressure on the properties of phosphorus-doped p-type ZnO thin films grown by radio frequency-magnetron sputtering

2008 ◽  
Vol 92 (16) ◽  
pp. 161109 ◽  
Author(s):  
Dae-Kue Hwang ◽  
Min-Suk Oh ◽  
Yong-Seok Choi ◽  
Seong-Ju Park
Keyword(s):  
Thin Films ◽  
Magnetron Sputtering ◽  
Radio Frequency ◽  
Radio Frequency Magnetron ◽  
Zno Thin Films ◽  
Radio Frequency Magnetron Sputtering ◽  
Effect Of Pressure ◽  
P Type ◽  
Phosphorus Doped

scholarly journals Study of the photoluminescence of phosphorus-doped p-type ZnO thin films grown by radio-frequency magnetron sputtering

2005 ◽  
Vol 86 (15) ◽  
pp. 151917 ◽  
Author(s):  
Dae-Kue Hwang ◽  
Hyun-Sik Kim ◽  
Jae-Hong Lim ◽  
Jin-Yong Oh ◽  
Jin-Ho Yang ◽  
...  
Keyword(s):  
Thin Films ◽  
Magnetron Sputtering ◽  
Radio Frequency ◽  
Radio Frequency Magnetron ◽  
Zno Thin Films ◽  
Radio Frequency Magnetron Sputtering ◽  
P Type ◽  
Phosphorus Doped

scholarly journals Hydrogen incorporation effect in phosphorus-doped p-type ZnO thin films grown by radio-frequency magnetron sputtering

RSC Advances ◽  
2017 ◽  
Vol 7 (26) ◽  
pp. 16119-16125 ◽  
Author(s):  
Min-Suk Oh ◽  
R. Navamathavan
Keyword(s):  
Thin Films ◽  
Magnetron Sputtering ◽  
Radio Frequency ◽  
Rf Magnetron Sputtering ◽  
Zno Thin Films ◽  
Radio Frequency Magnetron Sputtering ◽  
Hydrogen Incorporation ◽  
Doped Zno ◽  
P Type ◽  
Phosphorus Doped

We report on the influence of hydrogen incorporation on the conductivity of phosphorous (P) doped ZnO thin films grown by using radio-frequency (RF) magnetron sputtering.

Microstructural properties of phosphorus-doped p-type ZnO grown by radio-frequency magnetron sputtering

2008 ◽  
Vol 93 (11) ◽  
pp. 111905 ◽  
Author(s):  
Min-Suk Oh ◽  
Dae-Kue Hwang ◽  
Yong-Seok Choi ◽  
Jang-Won Kang ◽  
Seong-Ju Park ◽  
...  
Keyword(s):  
Magnetron Sputtering ◽  
Radio Frequency ◽  
Radio Frequency Magnetron ◽  
Microstructural Properties ◽  
Radio Frequency Magnetron Sputtering ◽  
P Type ◽  
Phosphorus Doped
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