The deposition and wet etching of Mg-doped ZnO films and their applications for solidly mounted resonators
Keyword(s):
In this report, a solidly mounted resonator (SMR), consisting of an Au electrode, Mg-doped ZnO (MgXZn1−XO) piezoelectric film and Bragg acoustic reflector, was fabricated on a Si substrate by radio frequency (RF) magnetron sputtering.
2004 ◽
Vol 221
(1-4)
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pp. 32-37
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Keyword(s):
2018 ◽
Vol 93
(4)
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pp. 439-447
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2008 ◽
Vol E91-C
(10)
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pp. 1649-1652
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2005 ◽
Vol 245
(1-4)
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pp. 414-419
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Keyword(s):
2009 ◽
Vol 311
(22)
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pp. 4641-4646
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