Salicidation process for submicrometre gate MOSFET fabrication using a resistless electron beam lithography process
1998 ◽
Vol 16
(6)
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pp. 3158
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2004 ◽
Vol 73-74
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pp. 662-665
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2000 ◽
Vol 18
(2)
◽
pp. 681-684
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Keyword(s):
2002 ◽
Vol 41
(Part 1, No. 6B)
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pp. 4122-4126
Keyword(s):
1998 ◽
Vol 37
(Part 1, No. 12B)
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pp. 6761-6766
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1999 ◽
Vol 17
(6)
◽
pp. 2507
◽