scholarly journals Plasma inhomogeneities near the electrodes of a capacitively-coupled radio-frequency discharge containing dust particles

2011 ◽  
Vol 56 (2) ◽  
pp. 24018 ◽  
Author(s):  
H. Tawidian ◽  
M. Mikikian ◽  
L. Couëdel ◽  
T. Lecas
Keyword(s):  
Radio Frequency ◽  
Dust Particles ◽  
Capacitively Coupled ◽  
Radio Frequency Discharge

scholarly journals Space and phase resolved plasma parameters in an industrial dual-frequency capacitively coupled radio-frequency discharge

2007 ◽  
Vol 40 (22) ◽  
pp. 7008-7018 ◽  
Author(s):  
J Schulze ◽  
T Gans ◽  
D O'Connell ◽  
U Czarnetzki ◽  
A R Ellingboe ◽  
...  
Keyword(s):  
Radio Frequency ◽  
Dual Frequency ◽  
Plasma Parameters ◽  
Capacitively Coupled ◽  
Radio Frequency Discharge

Hydro-carbon material design in a capacitively coupled radio-frequency discharge

2017 ◽  
Vol 15 (3) ◽  
pp. 1700152 ◽  
Author(s):  
Slobodan Mitic ◽  
Stéphane Coussan ◽  
Céline Martin ◽  
Lénaïc Couëdel
Keyword(s):  
Radio Frequency ◽  
Carbon Material ◽  
Material Design ◽  
Capacitively Coupled ◽  
Hydro Carbon ◽  
Radio Frequency Discharge

Analysis of the interaction between particles in non-ideal quasi-equilibrium extended systems

2010 ◽  
Vol 76 (3-4) ◽  
pp. 593-602
Author(s):  
O. S. VAULINA ◽  
E. A. LISIN ◽  
A. V. GAVRIKOV ◽  
O. F. PETROV ◽  
V. E. FORTOV
Keyword(s):  
Inverse Problem ◽  
Radio Frequency ◽  
Dusty Plasma ◽  
Statistical Physics ◽  
Dust Particles ◽  
Langevin Equations ◽  
Quasi Equilibrium ◽  
Experimental Application ◽  
Extended Systems ◽  
Radio Frequency Discharge

AbstractTwo techniques for the analysis of the interaction between particles in non-ideal quasi-equilibrium extended systems are considered. The first technique is based on a solution of the inverse problem describing the movement of dust particles by a system of Langevin equations. The second technique proceeds from the basic integral approaches of statistical physics. The conditions for the correct use of these techniques are presented, together with the results of their experimental application for the analysis of inter-grain interactions in the dusty plasma of radio frequency discharge.

Detection of particles of less than 5 nm in diameter formed in an argon–silane capacitively coupled radio-frequency discharge

2001 ◽  
Vol 79 (26) ◽  
pp. 4301-4303 ◽  
Author(s):  
L. Boufendi ◽  
J. Gaudin ◽  
S. Huet ◽  
G. Viera ◽  
M. Dudemaine
Keyword(s):  
Radio Frequency ◽  
Capacitively Coupled ◽  
Radio Frequency Discharge

Sheath motion in a capacitively coupled radio frequency discharge

1991 ◽  
Vol 19 (4) ◽  
pp. 619-627 ◽  
Author(s):  
B.P. Wood ◽  
M.A. Lieberman ◽  
A.J. Lichtenberg
Keyword(s):  
Radio Frequency ◽  
Capacitively Coupled ◽  
Radio Frequency Discharge
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