Influences of Gap Distance on Plasma Characteristics in Narrow Gap Capacitively Coupled Radio-Frequency Discharge

2004 ◽  
Vol 43 (2) ◽  
pp. 795-799 ◽  
Author(s):  
Yasunori Ohtsu ◽  
Hiroharu Fujita
Keyword(s):  
Radio Frequency ◽  
Narrow Gap ◽  
Capacitively Coupled ◽  
Plasma Characteristics ◽  
Radio Frequency Discharge

scholarly journals Space and phase resolved plasma parameters in an industrial dual-frequency capacitively coupled radio-frequency discharge

2007 ◽  
Vol 40 (22) ◽  
pp. 7008-7018 ◽  
Author(s):  
J Schulze ◽  
T Gans ◽  
D O'Connell ◽  
U Czarnetzki ◽  
A R Ellingboe ◽  
...  
Keyword(s):  
Radio Frequency ◽  
Dual Frequency ◽  
Plasma Parameters ◽  
Capacitively Coupled ◽  
Radio Frequency Discharge

Hydro-carbon material design in a capacitively coupled radio-frequency discharge

2017 ◽  
Vol 15 (3) ◽  
pp. 1700152 ◽  
Author(s):  
Slobodan Mitic ◽  
Stéphane Coussan ◽  
Céline Martin ◽  
Lénaïc Couëdel
Keyword(s):  
Radio Frequency ◽  
Carbon Material ◽  
Material Design ◽  
Capacitively Coupled ◽  
Hydro Carbon ◽  
Radio Frequency Discharge

scholarly journals Effect of dust particle size on the plasma characteristics in a radio frequency capacitively coupled silane plasma

2018 ◽  
Vol 52 (1) ◽  
pp. 015206 ◽  
Author(s):  
Wen-Zhu Jia ◽  
Quan-Zhi Zhang ◽  
Xi-Feng Wang ◽  
Yuan-Hong Song ◽  
Ying-Ying Zhang ◽  
...  
Keyword(s):  
Particle Size ◽  
Radio Frequency ◽  
Dust Particle ◽  
Capacitively Coupled ◽  
Plasma Characteristics ◽  
Silane Plasma

Detection of particles of less than 5 nm in diameter formed in an argon–silane capacitively coupled radio-frequency discharge

2001 ◽  
Vol 79 (26) ◽  
pp. 4301-4303 ◽  
Author(s):  
L. Boufendi ◽  
J. Gaudin ◽  
S. Huet ◽  
G. Viera ◽  
M. Dudemaine
Keyword(s):  
Radio Frequency ◽  
Capacitively Coupled ◽  
Radio Frequency Discharge

Sheath motion in a capacitively coupled radio frequency discharge

1991 ◽  
Vol 19 (4) ◽  
pp. 619-627 ◽  
Author(s):  
B.P. Wood ◽  
M.A. Lieberman ◽  
A.J. Lichtenberg
Keyword(s):  
Radio Frequency ◽  
Capacitively Coupled ◽  
Radio Frequency Discharge
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