Structural and electrical characterization of n+-type ion-implanted 6H-SiC
2004 ◽
Vol 27
(1-3)
◽
pp. 239-242
◽
2003 ◽
Vol 18
(6)
◽
pp. 554-559
◽
Keyword(s):
2003 ◽
Vol 433-436
◽
pp. 621-624
Keyword(s):