Polycrystalline silicon thin-film transistor with self-aligned SiGe raised source/drain
1998 ◽
Vol 45
(12)
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pp. 2548-2551
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2009 ◽
Vol 30
(1)
◽
pp. 36-38
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2003 ◽
Vol 42
(Part 1, No. 3)
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pp. 1164-1167
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2009 ◽
Vol 48
(2)
◽
pp. 020205
◽
Keyword(s):
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