Motion error compensation of a mechanical contact spindle using a multi-degree-of-freedom micropositioning stage
2005 ◽
Vol 76
(2)
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pp. 025104
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2006 ◽
Vol 20
(1)
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pp. 51-58
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Keyword(s):
2013 ◽
Vol 10
(10)
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pp. 355
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Keyword(s):
Keyword(s):
Keyword(s):
2013 ◽
Vol 2013.7
(0)
◽
pp. 173-176