Motion error compensation of a mechanical contact spindle using a multi-degree-of-freedom micropositioning stage

2005 ◽  
Vol 76 (2) ◽  
pp. 025104 ◽  
Author(s):  
Takaaki Oiwa ◽  
Katsumi Kaneko ◽  
Akira Kyusojin
Author(s):  
Xinyu Mao ◽  
Zhongyu Li ◽  
Yuxin Ma ◽  
Yu Hai ◽  
Junjie Wu ◽  
...  

Sensors ◽  
2008 ◽  
Vol 8 (5) ◽  
pp. 3384-3405 ◽  
Author(s):  
José-Tomás González-Partida ◽  
Pablo Almorox-González ◽  
Mateo Burgos-Garcia ◽  
Blas-Pablo Dorta-Naranjo

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