Thermal stability of low dielectric constant porous silica films
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2004 ◽
Vol 151
(6)
◽
pp. F146
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1998 ◽
Vol 332
(1-2)
◽
pp. 351-355
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2005 ◽
Vol 8
(4)
◽
pp. 467-471
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2001 ◽
Vol 148
(4)
◽
pp. F67
◽
2018 ◽
Vol 98
◽
pp. 347-353
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