Integration of lead zirconium titanate thin films for high density ferroelectric random access memory

2006 ◽  
Vol 100 (5) ◽  
pp. 051604 ◽  
Author(s):  
Kinam Kim ◽  
Sungyung Lee
Keyword(s):  
Thin Films ◽  
Random Access ◽  
Random Access Memory ◽  
High Density ◽  
Zirconium Titanate ◽  
Lead Zirconium Titanate ◽  
Access Memory ◽  
Ferroelectric Random Access Memory

Integration of SrBi2Ta2O9 thin films for high density ferroelectric random access memory

2006 ◽  
Vol 100 (5) ◽  
pp. 051603 ◽  
Author(s):  
D. J. Wouters ◽  
D. Maes ◽  
L. Goux ◽  
J. G. Lisoni ◽  
V. Paraschiv ◽  
...  
Keyword(s):  
Thin Films ◽  
Random Access ◽  
Random Access Memory ◽  
High Density ◽  
Access Memory ◽  
Ferroelectric Random Access Memory

Preparation of Pb(ZrxTi1 - x)O3 Films on Trench Structure for High-Density Ferroelectric Random Access Memory

2004 ◽  
Vol 66 (1) ◽  
pp. 85-95 ◽  
Author(s):  
YOUNGSOO PARK ◽  
JUNG HYUN LEE ◽  
JUNE MO KOO ◽  
SUK PIL KIM ◽  
SANGMIN SHIN ◽  
...  
Keyword(s):  
Random Access ◽  
Random Access Memory ◽  
High Density ◽  
Access Memory ◽  
Ferroelectric Random Access Memory ◽  
Trench Structure

Manufacturable High-Density 8 Mbit One Transistor–One Capacitor Embedded Ferroelectric Random Access Memory

2008 ◽  
Vol 47 (4) ◽  
pp. 2710-2713 ◽  
Author(s):  
K. R. Udayakumar ◽  
T. S. Moise ◽  
S. R. Summerfelt ◽  
K. Boku ◽  
K. Remack ◽  
...  
Keyword(s):  
Random Access ◽  
Random Access Memory ◽  
High Density ◽  
Access Memory ◽  
Ferroelectric Random Access Memory
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