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Characterization of Copper Line Array Erosion with Picosecond Ultrasonics
Mapping Intimacies
◽
10.1063/1.2799398
◽
2007
◽
Author(s):
Nicolas Pic
◽
Karim Bennedine
◽
Guray Tas
◽
Dario Alliata
◽
Jana Clerico
◽
...
Keyword(s):
Copper Line
◽
Line Array
◽
Picosecond Ultrasonics
Download Full-text
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Picosecond ultrasonics for elasticity-based imaging and characterization of biological cells
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10.1063/5.0023744
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2020
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Picosecond ultrasonics : an original tool for physical characterization of Bragg reflectors in bulk acoustic wave resonators
IEEE Ultrasonics Symposium, 2005.
◽
10.1109/ultsym.2005.1602997
◽
2006
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Author(s):
P. Emery
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G. Caruyer
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N. Casanova
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Physical Characterization
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Bulk Acoustic Wave
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Bragg Reflectors
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Acoustic Wave Resonators
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Bulk Acoustic Wave Resonators
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Picosecond ultrasonics: Characterization of single crystal piezoelectric materials for advanced RF filters
2018 29th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC)
◽
10.1109/asmc.2018.8373163
◽
2018
◽
Cited By ~ 1
Author(s):
C. Hayden
◽
J. B. Kwon
◽
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◽
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◽
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Single Crystal
◽
Piezoelectric Materials
◽
Rf Filters
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Characterization of Ta and TaN diffusion barriers beneath Cu layers using picosecond ultrasonics
Ultrasonics
◽
10.1016/j.ultras.2006.05.097
◽
2006
◽
Vol 44
◽
pp. e1269-e1275
◽
Cited By ~ 16
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Juerg Bryner
◽
Dieter M. Profunser
◽
Jacqueline Vollmann
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Diffusion Barriers
◽
Picosecond Ultrasonics
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CHARACTERIZATION OF TRANSPARENT AND OPAQUE THIN FILMS USING LASER PICOSECOND ULTRASONICS
Nondestructive Testing And Evaluation
◽
10.1080/10589759208952995
◽
1992
◽
Vol 7
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◽
pp. 149-163
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Complete elastic characterization of lithium phosphorous oxynitride films using picosecond ultrasonics
Thin Solid Films
◽
10.1016/j.tsf.2013.08.080
◽
2013
◽
Vol 548
◽
pp. 366-370
◽
Cited By ~ 12
Author(s):
F. Xu
◽
L. Belliard
◽
D. Fournier
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E. Charron
◽
J.-Y. Duquesne
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Picosecond Ultrasonics
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Characterization of sub-50-nm line array structures with angle-resolved multiple wavelength scatterometry
10.1117/12.772580
◽
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◽
Author(s):
Michael Kotelyanskii
◽
Fei Shen
◽
Gary Jiang
◽
Benjamin Bunday
Keyword(s):
Multiple Wavelength
◽
Line Array
◽
Array Structures
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Characterization of thin-film adhesion and phonon lifetimes in Al/Si membranes by picosecond ultrasonics
New Journal of Physics
◽
10.1088/1367-2630/aa6d05
◽
2017
◽
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◽
pp. 053019
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Martin Schubert
◽
Chuan He
◽
Delia Brick
◽
Elke Scheer
◽
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Keyword(s):
Thin Film
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Film Adhesion
◽
Thin Film Adhesion
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Picosecond Ultrasonics
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Characterization of Sub-micron Metal Line Arrays Using Picosecond Ultrasonics
2020 31st Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC)
◽
10.1109/asmc49169.2020.9185245
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2020
◽
Author(s):
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◽
M. Kotelyanskii
◽
R. Mair
◽
P. Mukundhan
◽
J. Bogdanowicz
◽
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Keyword(s):
Metal Line
◽
Picosecond Ultrasonics
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Thermomechanical characterization of a nanoscale copper thin-film using picosecond ultrasonics
International Journal of Precision Engineering and Manufacturing
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10.1007/s12541-017-0146-9
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2017
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Vol 18
(9)
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pp. 1245-1251
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Cited By ~ 2
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Keyword(s):
Thin Film
◽
Copper Thin Film
◽
Picosecond Ultrasonics
◽
Thermomechanical Characterization
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