Characterization of Ta and TaN diffusion barriers beneath Cu layers using picosecond ultrasonics

Ultrasonics ◽  
2006 ◽  
Vol 44 ◽  
pp. e1269-e1275 ◽  
Author(s):  
Juerg Bryner ◽  
Dieter M. Profunser ◽  
Jacqueline Vollmann ◽  
Elisabeth Mueller ◽  
Juerg Dual
Keyword(s):  
Diffusion Barriers ◽  
Picosecond Ultrasonics

scholarly journals Picosecond ultrasonics for elasticity-based imaging and characterization of biological cells

2020 ◽  
Vol 128 (16) ◽  
pp. 160902 ◽  
Author(s):  
Fernando Pérez-Cota ◽  
Rafael Fuentes-Domínguez ◽  
Salvatore La Cavera ◽  
William Hardiman ◽  
Mengting Yao ◽  
...  
Keyword(s):  
Biological Cells ◽  
Picosecond Ultrasonics

Identification and characterization of diffusion barriers for Cu/SiC systems

2005 ◽  
Vol 40 (13) ◽  
pp. 3383-3393 ◽  
Author(s):  
Glenn Sundberg ◽  
Pradeep Paul ◽  
Changmo Sung ◽  
Thomas Vasilos
Keyword(s):  
Diffusion Barriers ◽  
Identification And Characterization

Electrical Characterization of Ion Imiplanted, Thermally Annealed TiN Films Acting as Diffusion Barriers on Shallow Junction Silicon Devices

1985 ◽  
Vol 45 ◽  
Author(s):  
A. Armigliato ◽  
M. Finetti ◽  
E. Gabilli ◽  
S. Guerri ◽  
P. Ostoja ◽  
...  
Keyword(s):  
Contact Resistance ◽  
Contact Area ◽  
Electrical Characterization ◽  
Diffusion Barriers ◽  
Contact Structures ◽  
Thermal Treatments ◽  
Tin Films ◽  
Shallow Junction ◽  
Silicon Devices

ABSTRACTTiN films prepared by implantation onto evaporated Ti layers are tested as diffusion barriers in contact with a thick Al overlayer. Both the TiN/Al and TiSi2/TiN/Al contact structures are evaluated, after thermal treatments up to 600 C, on shallow junction diodes and four terminal resistor test patterns for contact resistance measurements. It is shown that, upon annealing at 600 C, the TiSi2/TiN/Al contact system still exhibits excellent electrical performances. The degradation is found to depend on TiSi2 thickness and contact area.

CHARACTERIZATION OF TRANSPARENT AND OPAQUE THIN FILMS USING LASER PICOSECOND ULTRASONICS

1992 ◽  
Vol 7 (1-6) ◽  
pp. 149-163 ◽  
Author(s):  
O.B WRIGHT ◽  
T. HYOGUCHI ◽  
K. KAWASHIMA
Keyword(s):  
Thin Films ◽  
Picosecond Ultrasonics

Laser acoustic characterization of Ta and TaN diffusion barriers beneath Cu layers

2005 ◽  
Author(s):  
Jacqueline Vollmann ◽  
Dieter M. Profunser ◽  
Jurg Bryner ◽  
Jurg Dual
Keyword(s):  
Diffusion Barriers ◽  
Acoustic Characterization

Characterization of vanadium diffusion barriers in Nb-Sn composite wires

1987 ◽  
Vol 23 (2) ◽  
pp. 1347-1350 ◽  
Author(s):  
D. Smathers ◽  
P. O'Larey ◽  
M. Siddall ◽  
J. Peterson ◽  
Wm. McDonald
Keyword(s):  
Diffusion Barriers ◽  
Composite Wires
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