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Characterization of Sub-micron Metal Line Arrays Using Picosecond Ultrasonics
2020 31st Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC)
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10.1109/asmc49169.2020.9185245
◽
2020
◽
Author(s):
M. Mehendale
◽
M. Kotelyanskii
◽
R. Mair
◽
P. Mukundhan
◽
J. Bogdanowicz
◽
...
Keyword(s):
Metal Line
◽
Picosecond Ultrasonics
Download Full-text
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Picosecond ultrasonics for elasticity-based imaging and characterization of biological cells
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10.1063/5.0023744
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2020
◽
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pp. 160902
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Picosecond ultrasonics : an original tool for physical characterization of Bragg reflectors in bulk acoustic wave resonators
IEEE Ultrasonics Symposium, 2005.
◽
10.1109/ultsym.2005.1602997
◽
2006
◽
Cited By ~ 4
Author(s):
P. Emery
◽
G. Caruyer
◽
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N. Casanova
◽
P. Ancey
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...
Keyword(s):
Acoustic Wave
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Physical Characterization
◽
Bulk Acoustic Wave
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Bragg Reflectors
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Acoustic Wave Resonators
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Bulk Acoustic Wave Resonators
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Picosecond ultrasonics: Characterization of single crystal piezoelectric materials for advanced RF filters
2018 29th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC)
◽
10.1109/asmc.2018.8373163
◽
2018
◽
Cited By ~ 1
Author(s):
C. Hayden
◽
J. B. Kwon
◽
D. Kim
◽
S. Gibb
◽
R. Mair
◽
...
Keyword(s):
Single Crystal
◽
Piezoelectric Materials
◽
Rf Filters
◽
Picosecond Ultrasonics
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Characterization of Ta and TaN diffusion barriers beneath Cu layers using picosecond ultrasonics
Ultrasonics
◽
10.1016/j.ultras.2006.05.097
◽
2006
◽
Vol 44
◽
pp. e1269-e1275
◽
Cited By ~ 16
Author(s):
Juerg Bryner
◽
Dieter M. Profunser
◽
Jacqueline Vollmann
◽
Elisabeth Mueller
◽
Juerg Dual
Keyword(s):
Diffusion Barriers
◽
Picosecond Ultrasonics
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CHARACTERIZATION OF TRANSPARENT AND OPAQUE THIN FILMS USING LASER PICOSECOND ULTRASONICS
Nondestructive Testing And Evaluation
◽
10.1080/10589759208952995
◽
1992
◽
Vol 7
(1-6)
◽
pp. 149-163
◽
Cited By ~ 1
Author(s):
O.B WRIGHT
◽
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Thin Films
◽
Picosecond Ultrasonics
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Characterization of Copper Line Array Erosion with Picosecond Ultrasonics
10.1063/1.2799398
◽
2007
◽
Author(s):
Nicolas Pic
◽
Karim Bennedine
◽
Guray Tas
◽
Dario Alliata
◽
Jana Clerico
◽
...
Keyword(s):
Copper Line
◽
Line Array
◽
Picosecond Ultrasonics
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Complete elastic characterization of lithium phosphorous oxynitride films using picosecond ultrasonics
Thin Solid Films
◽
10.1016/j.tsf.2013.08.080
◽
2013
◽
Vol 548
◽
pp. 366-370
◽
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Author(s):
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◽
L. Belliard
◽
D. Fournier
◽
E. Charron
◽
J.-Y. Duquesne
◽
...
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Picosecond Ultrasonics
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Characterization of thin-film adhesion and phonon lifetimes in Al/Si membranes by picosecond ultrasonics
New Journal of Physics
◽
10.1088/1367-2630/aa6d05
◽
2017
◽
Vol 19
(5)
◽
pp. 053019
◽
Cited By ~ 11
Author(s):
Martin Grossmann
◽
Martin Schubert
◽
Chuan He
◽
Delia Brick
◽
Elke Scheer
◽
...
Keyword(s):
Thin Film
◽
Film Adhesion
◽
Thin Film Adhesion
◽
Picosecond Ultrasonics
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Characterization of metal line-width variation in via first dual-damascene approach and its modeling using machine learning artificial neural network algorithms
Design-Process-Technology Co-optimization for Manufacturability XII
◽
10.1117/12.2297256
◽
2018
◽
Author(s):
Pietro Cantu
◽
Chiara Catarisano
◽
Nicoletta Corneo
◽
Emma Litterio
◽
Benedetta Triulzi
◽
...
Keyword(s):
Neural Network
◽
Machine Learning
◽
Artificial Neural Network
◽
Line Width
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Metal Line
◽
Network Algorithms
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Dual Damascene
◽
Artificial Neural
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P-166: Microstructural Characterization of the Interface between IZO and Mo/Al/Mo Metal Line Used in TFT-LCDs
SID Symposium Digest of Technical Papers
◽
10.1889/1.2036439
◽
2005
◽
Vol 36
(1)
◽
pp. 332
◽
Cited By ~ 2
Author(s):
Sunglak Choi
◽
Seong-Yong Hwang
◽
Weon Sik Oh
◽
Miyang Kim
Keyword(s):
Microstructural Characterization
◽
Metal Line
Download Full-text
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