Effect of antenna capacitance on the plasma characteristics of an internal linear inductively coupled plasma system

2008 ◽  
Vol 15 (8) ◽  
pp. 083501 ◽  
Author(s):  
Jong Hyeuk Lim ◽  
Kyong Nam Kim ◽  
Jung Kyun Park ◽  
Geun Young Yeom
Keyword(s):  
Inductively Coupled Plasma ◽  
Plasma System ◽  
Inductively Coupled ◽  
Plasma Characteristics

Diamond-like amorphous carbon layer film by an inductively coupled plasma system for next generation etching hard mask

2018 ◽  
Vol 663 ◽  
pp. 21-24 ◽  
Author(s):  
Se Jun Park ◽  
Dohyung Kim ◽  
Seungmoo Lee ◽  
Yongjoon Ha ◽  
Mingyoo Lim ◽  
...  
Keyword(s):  
Amorphous Carbon ◽  
Inductively Coupled Plasma ◽  
Carbon Layer ◽  
Next Generation ◽  
Plasma System ◽  
Layer Film ◽  
Hard Mask ◽  
Inductively Coupled ◽  
Amorphous Carbon Layer

scholarly journals Drinking Water Treatment by Inductively Coupled Plasma System to Remove of Microorganisms in River Water

2018 ◽  
Vol 156 ◽  
pp. 03038 ◽  
Author(s):  
Reni Desmiarti ◽  
Ariadi Hazmi ◽  
Primas Emeraldi ◽  
Munas Martynis ◽  
Yenni Trianda ◽  
...  
Keyword(s):  
Drinking Water ◽  
Energy Consumption ◽  
Water Treatment ◽  
River Water ◽  
Removal Efficiency ◽  
Inductively Coupled Plasma ◽  
Death Rate ◽  
Drinking Water Treatment ◽  
Plasma System ◽  
Inductively Coupled

Inductively coupled plasma system was used in drinking water treatment system to kill the microorganisms in water such as total coliforms (TC), fecal coliforms (FC) and other coliforms (OC) from river water. The aim of this study was to investigate the effect of flowrate on removal efficiency (RE), death rate, and death yield and energy consumption of bacteria's. The frequency of the system was set at 4.6 MHz. The results show that the removal efficiencies and death rate of TC, FC and OC decreased with increasing flowrate. Compared to FC, the first-order reactions of TC and OC were lower in the following order: FC > OC > TC. The death yield of TC and OC significantly increased when the removal efficiency increased. The electromagnetic flux varied from 19.44 to 20.55 W/cm2 and the energy consumption was 0.26, 0.32, and 0.67 with flow rate at 20, 10 and 5 mL/minute, respectively. These results are very necessary to improve drinking water treatment.

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