Plasma Characteristics of Large Area Inductively Coupled Plasma System Using Ferrite-Module-Enhanced U-Type Antenna
2009 ◽
Vol 48
(11)
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pp. 116006
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2014 ◽
Vol 16
(8)
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pp. 758-766
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2010 ◽
Vol 38
(2)
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pp. 133-136
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Keyword(s):
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2015 ◽
Vol 24
(4)
◽
pp. 044007
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Keyword(s):
Keyword(s):
2015 ◽
Vol 2015
(1)
◽
pp. 000757-000760
2004 ◽
Vol 14
(4)
◽
pp. 656-662
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Keyword(s):
Keyword(s):