Sputtering of chlorinated silicon surfaces studied by secondary ion mass spectrometry and ion scattering spectroscopy
1981 ◽
Vol 2
(2-3)
◽
pp. 267-280
◽
1980 ◽
Vol 74
(1)
◽
pp. 150-162
◽
1983 ◽
Vol 84
(2)
◽
pp. 410-422
◽
1978 ◽
Vol 125
(8)
◽
pp. 1215-1218
◽
1975 ◽
Vol 12
(1)
◽
pp. 352-353
◽
Keyword(s):