Sputtering of chlorinated silicon surfaces studied by secondary ion mass spectrometry and ion scattering spectroscopy

1985 ◽  
Vol 57 (4) ◽  
pp. 1336-1342 ◽  
Author(s):  
E. L. Barish ◽  
D. J. Vitkavage ◽  
T. M. Mayer
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