Heat resistance of hydrogenated amorphous silicon films prepared by compressed magnetic field‐magnetron sputtering with He and Ar gases
1988 ◽
Vol 103
(1)
◽
pp. 143-148
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1988 ◽
Vol 27
(Part 2, No. 10)
◽
pp. L1806-L1808
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2000 ◽
Vol 10
(3)
◽
pp. 185-191
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Keyword(s):
2016 ◽
Vol 55
(4S)
◽
pp. 04ES05
◽
Keyword(s):
1999 ◽
Vol 17
(6)
◽
pp. 3240-3245
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