Single scan defect identification by deep level transient spectroscopy using a two‐phase lock‐in amplifier (IQ‐DLTS)

ABSTRACTKinetics of persistent photoconductivity, photoquenching, and thermal and optical recovery observed in low energy Ar+ bombarded on (100) GaAs surfaces have been investigated. Rate and transport equations for these processes were derived and simulated employing transport parameters, trap locations and densities determined by deep level transient spectroscopy. Excellent correlation was obtained between the results of preliminary simulation and the experimentally observed values. The exponential decay of persistent photoconductivity response curve was determined to be due to metastable electron traps with longer lifetime and is consistent with an earlier proposed model.

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Deep level study in epitaxial 4H-SiC grown on substrates inclined toward

MRS Proceedings ◽

10.1557/proc-719-f8.11 ◽

2002 ◽

Vol 719 ◽

Cited By ~ 1

Author(s):

Masashi Kato ◽

Masaya Ichimura ◽

Eisuke Arai ◽

Shigehiro Nishino

Keyword(s):

Deep Level Transient Spectroscopy ◽

Deep Level ◽

Activation Energies ◽

Thickness Dependence ◽

Epitaxial Layers ◽

Transient Spectroscopy

AbstractEpitaxial layers of 4H-SiC are grown on (0001) substrates inclined toward <1120> and <1100> directions. Defects in these films are characterized by deep level transient spectroscopy (DLTS) in order to clarify the dependence of concentrations and activation energies on substrate inclination. DLTS results show no such dependence on substrate inclination but show thickness dependence of the concentration.

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Two-Dimensional Local Deep-Level Transient Spectroscopy Imaging Using Super-Higher-Order Scanning Nonlinear Dielectric Microscopy

ISTFA 2016: Conference Proceedings from the 42nd International Symposium for Testing and Failure Analysis ◽

10.31399/asm.cp.istfa2016p0441 ◽

2016 ◽

Author(s):

N. Chinone ◽

Y. Cho ◽

R. Kosugi ◽

Y. Tanaka ◽

S. Harada ◽

...

Keyword(s):

Deep Level Transient Spectroscopy ◽

Deep Level ◽

Higher Order ◽

Trap Density ◽

New Technique ◽

Two Dimensional ◽

Nonlinear Dielectric ◽

Annealing Conditions ◽

Transient Spectroscopy ◽

A New Technique

Abstract A new technique for local deep level transient spectroscopy (DLTS) imaging using super-higher-order scanning nonlinear dielectric microscopy is proposed. Using this technique. SiCVSiC structure samples with different post oxidation annealing conditions were measured. We observed that the local DLTS signal decreases with post oxidation annealing (POA), which agrees with the well-known phenomena that POA reduces trap density. Furthermore, obtained local DLTS images had dark and bright areas, which is considered to show the trap distribution at/near SiCVSiC interface.

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Deep Level Transient Spectroscopy Study of Defects and Impurities in GaN and Related III-N Materials

10.21236/ada418082 ◽

2003 ◽

Author(s):

David C. Look

Keyword(s):

Deep Level Transient Spectroscopy ◽

Deep Level ◽

Spectroscopy Study ◽

Defects And Impurities ◽

Transient Spectroscopy

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Deep-Level Transient Spectroscopy Study on Double Implanted N(+)-p and p(+)-n 4H-SiC Diodes

10.21236/ada424908 ◽

2004 ◽

Author(s):

Souvick Mitra ◽

Mulpuri V. Rao ◽

N. Papanicolaou ◽

K. A. Jones ◽

M. Derenge

Keyword(s):

Deep Level Transient Spectroscopy ◽

Deep Level ◽

Spectroscopy Study ◽

Transient Spectroscopy

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Electron Irradiation Induced Trap In N-Type Gan

MRS Proceedings ◽

10.1557/proc-482-881 ◽

1997 ◽

Vol 482 ◽

Cited By ~ 7

Author(s):

Z-Q. Fang ◽

J. W. Hemsky ◽

D. C. Look ◽

M. P. Mack ◽

R. J. Molnar ◽

...

Keyword(s):

Electron Irradiation ◽

Deep Level Transient Spectroscopy ◽

Deep Level ◽

Chemical Vapor ◽

Hydride Vapor Phase Epitaxy ◽

Organic Chemical ◽

Electric Field Effects ◽

Metal Organic ◽

Transient Spectroscopy ◽

Organic Chemical Vapor Deposition

AbstractA 1-MeV-electron-irradiation (EI) induced trap at Ec-0.18 eV is found in n-type GaN by deep level transient spectroscopy (DLTS) measurements on Schottky barrier diodes, fabricated on both metal-organic-chemical-vapor-deposition and hydride-vapor-phase-epitaxy material grown on sapphire. The 300-K carrier concentrations of the two materials are 2.3 × 1016 cm−3 and 1.3 × 1017 cm−3, respectively. Up to an irradiation dose of 1 × 1015 cm−2, the electron concentrations and pre-existing traps in the GaN layers are not significantly affected, while the EI-induced trap is produced at a rate of at least 0.2 cm−1. The DLTS peaks in the two materials are shifted slightly, possibly due to electric-field effects. Comparison with theory suggests that the defect is most likely associated with the N vacancy or Ga interstitial.

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