Ion energy distributions in dual‐ and single‐mode microwave/radio‐frequency plasma

1995 ◽  
Vol 78 (8) ◽  
pp. 4855-4858 ◽  
Author(s):  
P. Reinke ◽  
S. Bureau ◽  
J. E. Klemberg‐Sapieha ◽  
L. Martinu
Keyword(s):  
Radio Frequency ◽  
Single Mode ◽  
Radio Frequency Plasma ◽  
Energy Distributions ◽  
Ion Energy ◽  
Frequency Plasma ◽  
Microwave Radio ◽  
Ion Energy Distributions

Diamond-like carbon films deposited in a dual microwave-radio-frequency plasma

1992 ◽  
Vol 11 (1-4) ◽  
pp. 321-324 ◽  
Author(s):  
O.M. Küttel ◽  
L. Martinu ◽  
D. Poitras ◽  
J.E. Klemberg-Sapieha ◽  
M.R. Wertheimer
Keyword(s):  
Radio Frequency ◽  
Carbon Films ◽  
Diamond Like Carbon ◽  
Radio Frequency Plasma ◽  
Frequency Plasma ◽  
Microwave Radio
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