Particle-in-cell and TAMIX simulation of the hydrogen plasma immersion ion implantation ion-cut process

2003 ◽  
Author(s):  
D. Tat-Kun Kwok ◽  
P.K. Chu ◽  
B.P. Wood ◽  
Chung Chan
Keyword(s):  
Ion Implantation ◽  
Hydrogen Plasma ◽  
Particle In Cell ◽  
Plasma Immersion Ion Implantation

Particle-in-cell numerical simulation of non-uniform plasma immersion ion implantation

2007 ◽  
Vol 201 (9-11) ◽  
pp. 5458-5462 ◽  
Author(s):  
Y.X. Huang ◽  
X.B. Tian ◽  
S.Q. Yang ◽  
Ricky K.Y. Fu ◽  
Paul K. Chu
Keyword(s):  
Numerical Simulation ◽  
Ion Implantation ◽  
Particle In Cell ◽  
Plasma Immersion Ion Implantation ◽  
Uniform Plasma

Metallic contamination in hydrogen plasma immersion ion implantation of silicon

2001 ◽  
Vol 90 (8) ◽  
pp. 3743-3749 ◽  
Author(s):  
Paul K. Chu ◽  
Ricky K. Y. Fu ◽  
Xuchu Zeng ◽  
Dixon T. K. Kwok
Keyword(s):  
Ion Implantation ◽  
Hydrogen Plasma ◽  
Plasma Immersion Ion Implantation ◽  
Metallic Contamination

Investigation of plasma immersion ion implantation of nickel-titanium rod by multiple-grid particle-in-cell simulation

2008 ◽  
Vol 103 (5) ◽  
pp. 053308 ◽  
Author(s):  
Dixon T. K. Kwok ◽  
Shuilin Wu ◽  
Xiangmei Liu ◽  
Ricky K. Y. Fu ◽  
Paul K. Chu
Keyword(s):  
Ion Implantation ◽  
Nickel Titanium ◽  
Particle In Cell ◽  
Cell Simulation ◽  
Plasma Immersion Ion Implantation
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