Direct quantitative detection of the sp3 bonding in diamond-like carbon films using ultraviolet and visible Raman spectroscopy

This paper compares the microstructure and electrochemical properties of the diamond-like carbon films obtained by two different deposition methods - microwave electron cyclotron resonance plasma enhanced chemical vapor deposition (MWECR-PECVD) techniques and electro-deposition – chosen for their low cost and capacity to produce films. The microstructure of the DLC films are investigated by Raman spectroscopy, FTIR spectroscopy, and electrochemical behavior is investigated by potentiodynamic and electrochemical impedance spectroscopy (EIS). Raman spectroscopy indicates that all the films deposited by different techniques show amorphous structure and typical characteristic of DLC film. FTIR spectrum results indicate that these DLC films are a-C:H films. As a result of EIS, the DLC films made by different methods showed obviously different electrochemical characters. The obtained results show that the DLC films deposited using the PECVD methods provided the better results, presenting a high corrosion resistance , high adherence to substrate, and a denser and more uniform surface.

Download Full-text

Pulsed electrodeposition of diamond-like carbon films

Journal of Materials Research ◽

10.1557/jmr.1997.0404 ◽

1997 ◽

Vol 12 (11) ◽

pp. 3102-3105 ◽

Cited By ~ 17

Author(s):

Hao Wang ◽

Ming-Rong Shen ◽

Zhao-Yuan Ning ◽

Chao Ye ◽

He-Sun Zhu

Keyword(s):

Raman Spectroscopy ◽

Carbon Films ◽

Methanol Solution ◽

Breakdown Field ◽

Diamond Like Carbon ◽

Current Voltage ◽

Chemical Inertness ◽

Current Voltage Characteristics ◽

Pulsed Electrodeposition ◽

Hardness Values

Diamond-like carbon (DLC) films have been prepared by electrolysis of methanol solution using a pulse-modulated source. The deposition rate of the films is enhanced significantly compared to that of dc value. That the films do not contain bonded hydrogen is confirmed by infrared spectra. The structures of the films are characterized by Raman spectroscopy. These films show chemical inertness and hardness values in the range 12.5–19 GPa. Current-voltage characteristics of the films are measured, indicating that the resistivity is in the 107 Ω cm range and the breakdown field is larger than 1 MV cm−1.

Download Full-text

Analysis of nitrogen-doped ion-beam-deposited hydrogenated diamond-like carbon films using ERDA/RBS, TOF-ERDA and Raman spectroscopy

Surface and Coatings Technology ◽

10.1016/j.surfcoat.2011.08.057 ◽

2012 ◽

Vol 211 ◽

pp. 72-75 ◽

Cited By ~ 6

Author(s):

M. Čekada ◽

M. Kahn ◽

P. Pelicon ◽

Z. Siketić ◽

I. Bogdanović Radović ◽

...

Keyword(s):

Raman Spectroscopy ◽

Ion Beam ◽

Carbon Films ◽

Diamond Like Carbon ◽

Nitrogen Doped

Download Full-text

Diamond like Carbon (DLC) Thin Films: Preparation and Characterization

Applied Mechanics and Materials ◽

10.4028/www.scientific.net/amm.575.292 ◽

2014 ◽

Vol 575 ◽

pp. 292-295 ◽

Cited By ~ 1

Author(s):

Sekhar C. Ray ◽

W. Mbiombi ◽

P. Papakonstantinou

Keyword(s):

Thin Films ◽

Raman Spectroscopy ◽

Bias Voltage ◽

Vapour Deposition ◽

Chemical Vapour ◽

Structural Disorder ◽

Carbon Films ◽

Diamond Like Carbon ◽

Increase With Increase ◽

Peak Increase

Diamond-like carbon (DLC) thin films are prepared using plasma enhanced chemical vapour deposition (PECVD) process at different bias voltage. We have studied their microstructural and electrical properties using Raman spectroscopy and current (I) – voltage (V) relationships. Electrical conductivity is gradually decreases with bias voltage as the films are becoming more and more diamond like carbon as observed from Raman spectroscopy results. Raman spectroscopy result shows that the ID/IG ratio gradually decreases indicating formation of more diamond like carbon films that responsible for the decrease of conductivity of the films. The full width half maximum of G peak increase with increase the bias voltage indicating the ring-like sp2 transforms to sp2 chains and raises the amount of sp3-chains. The structural disorder arises from the bond angle and bond length distortions in amorphous carbon films. Thus the structural disorder and mechanical properties such as hardness and elastic modulus increase with bias voltage.

Download Full-text