Diffusion of ion implanted aluminum in silicon carbide

1982 ◽  
Vol 77 (5) ◽  
pp. 2592-2598 ◽  
Author(s):  
Yo Tajima ◽  
Kazunori Kijima ◽  
W. D. Kingery
Keyword(s):  
Silicon Carbide ◽  
Ion Implanted

LASER INDUCED ORDERING AND DEFECTS IN ION-IMPLANTED HEXAGONAL SILICON CARBIDE

1980 ◽  
Vol 41 (C4) ◽  
pp. C4-111-C4-112 ◽  
Author(s):  
V. V. Makarov ◽  
T. Tuomi ◽  
K. Naukkarinen ◽  
M. Luomajärvi ◽  
M. Riihonen
Keyword(s):  
Silicon Carbide ◽  
Ion Implanted

Electrical characterization of TiC ohmic contacts to aluminum ion implanted 4H–silicon carbide

2000 ◽  
Vol 77 (10) ◽  
pp. 1478-1480 ◽  
Author(s):  
S.-K. Lee ◽  
C.-M. Zetterling ◽  
E. Danielsson ◽  
M. Östling ◽  
J.-P. Palmquist ◽  
...  
Keyword(s):  
Silicon Carbide ◽  
Ohmic Contacts ◽  
Electrical Characterization ◽  
Aluminum Ion ◽  
Ion Implanted

The origin of ferromagnetism in57Fe ion-implanted semiconducting 6H-polytype silicon carbide

2006 ◽  
Vol 18 (43) ◽  
pp. 9881-9900 ◽  
Author(s):  
F Stromberg ◽  
W Keune ◽  
X Chen ◽  
S Bedanta ◽  
H Reuther ◽  
...  
Keyword(s):  
Silicon Carbide ◽  
Ion Implanted

Chemical Etching of Ion Implanted Amorphous Silicon Carbide

1986 ◽  
Vol 133 (3) ◽  
pp. 650-652 ◽  
Author(s):  
J. A. Edmond ◽  
J. W. Palmour ◽  
R. F. Davis
Keyword(s):  
Silicon Carbide ◽  
Amorphous Silicon ◽  
Chemical Etching ◽  
Amorphous Silicon Carbide ◽  
Ion Implanted

RBS and optical studies of ion-implanted amorphous silicon carbide layers

Vacuum ◽  
2003 ◽  
Vol 70 (2-3) ◽  
pp. 457-465
Author(s):  
J. Romanek ◽  
A.P. Kobzev ◽  
M. Kulik ◽  
T. Tsvetkova ◽  
J. Żuk
Keyword(s):  
Silicon Carbide ◽  
Amorphous Silicon ◽  
Optical Studies ◽  
Amorphous Silicon Carbide ◽  
Ion Implanted

Near-field optical mapping of the ion-implanted patterns fabricated in amorphous silicon carbide

Vacuum ◽  
2005 ◽  
Vol 79 (1-2) ◽  
pp. 94-99 ◽  
Author(s):  
T. Tsvetkova ◽  
S. Takahashi ◽  
A. Zayats ◽  
P. Dawson ◽  
R. Turner ◽  
...  
Keyword(s):  
Silicon Carbide ◽  
Amorphous Silicon ◽  
Optical Mapping ◽  
Near Field ◽  
Amorphous Silicon Carbide ◽  
Ion Implanted
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