Dose dependence of microstructural evolution in oxygen-ion-implanted silicon carbide

1999 ◽  
Vol 75 (10) ◽  
pp. 1392-1394 ◽  
Author(s):  
Manabu Ishimaru ◽  
Kurt E. Sickafus
Keyword(s):  
Silicon Carbide ◽  
Microstructural Evolution ◽  
Dose Dependence ◽  
Oxygen Ion ◽  
Ion Implanted

LASER INDUCED ORDERING AND DEFECTS IN ION-IMPLANTED HEXAGONAL SILICON CARBIDE

1980 ◽  
Vol 41 (C4) ◽  
pp. C4-111-C4-112 ◽  
Author(s):  
V. V. Makarov ◽  
T. Tuomi ◽  
K. Naukkarinen ◽  
M. Luomajärvi ◽  
M. Riihonen
Keyword(s):  
Silicon Carbide ◽  
Ion Implanted

Diffusion of ion implanted aluminum in silicon carbide

1982 ◽  
Vol 77 (5) ◽  
pp. 2592-2598 ◽  
Author(s):  
Yo Tajima ◽  
Kazunori Kijima ◽  
W. D. Kingery
Keyword(s):  
Silicon Carbide ◽  
Ion Implanted

Electrical characterization of TiC ohmic contacts to aluminum ion implanted 4H–silicon carbide

2000 ◽  
Vol 77 (10) ◽  
pp. 1478-1480 ◽  
Author(s):  
S.-K. Lee ◽  
C.-M. Zetterling ◽  
E. Danielsson ◽  
M. Östling ◽  
J.-P. Palmquist ◽  
...  
Keyword(s):  
Silicon Carbide ◽  
Ohmic Contacts ◽  
Electrical Characterization ◽  
Aluminum Ion ◽  
Ion Implanted

The origin of ferromagnetism in57Fe ion-implanted semiconducting 6H-polytype silicon carbide

2006 ◽  
Vol 18 (43) ◽  
pp. 9881-9900 ◽  
Author(s):  
F Stromberg ◽  
W Keune ◽  
X Chen ◽  
S Bedanta ◽  
H Reuther ◽  
...  
Keyword(s):  
Silicon Carbide ◽  
Ion Implanted

Recrystallization of Oxygen Ion Implanted Ba0.7Sr0.3TiO3 Thin Films

2004 ◽  
Vol 83 (2) ◽  
pp. 436-438 ◽  
Author(s):  
R. Liedtke ◽  
S. Hoffmann ◽  
R. Waser
Keyword(s):  
Thin Films ◽  
Oxygen Ion ◽  
Ion Implanted
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