Laser, spectroscopic, and Langmuir probe diagnostics of an inductively-coupled rf discharge H− ion source

1992 ◽  
Author(s):  
A. T. Young ◽  
D. A. Bachman ◽  
P. Chen ◽  
K. N. Leung ◽  
C. Y. Li ◽  
...  
Keyword(s):  
Langmuir Probe ◽  
Ion Source ◽  
Rf Discharge ◽  
Inductively Coupled ◽  
Probe Diagnostics ◽  
Laser Spectroscopic

Langmuir Probe Diagnostics of Inductively Coupled Plasma Generated Using Flat Spiral Antenna

2020 ◽  
pp. 1-9
Author(s):  
Partha Karar ◽  
Gourav Kumar ◽  
Rajib Kar ◽  
Hitesh M. Kewlani ◽  
D. S. Patil ◽  
...  
Keyword(s):  
Langmuir Probe ◽  
Inductively Coupled Plasma ◽  
Spiral Antenna ◽  
Inductively Coupled ◽  
Probe Diagnostics ◽  
Flat Spiral

scholarly journals Langmuir Probe Diagnostics of Low-pressure Inductively Coupled Argon Plasmas in a Magnetic Field

2015 ◽  
Vol 71 ◽  
pp. 121-126 ◽  
Author(s):  
E. Meshcheryakova ◽  
M. Zibrov ◽  
A. Kaziev ◽  
G. Khodachenko ◽  
A. Pisarev
Keyword(s):  
Magnetic Field ◽  
Langmuir Probe ◽  
Low Pressure ◽  
Inductively Coupled ◽  
Argon Plasmas ◽  
Probe Diagnostics
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