Morphology and structure evolution of Cu(In,Ga)S2 films deposited by reactive magnetron co-sputtering with electron cyclotron resonance plasma assistance

2014 ◽  
Vol 115 (8) ◽  
pp. 084902 ◽  
Author(s):  
Man Nie ◽  
Klaus Ellmer
Keyword(s):  
Cyclotron Resonance ◽  
Electron Cyclotron Resonance ◽  
Electron Cyclotron ◽  
Structure Evolution ◽  
Reactive Magnetron ◽  
Electron Cyclotron Resonance Plasma ◽  
Morphology And Structure ◽  
Resonance Plasma

Electron cyclotron resonance plasma etching of InP in CH4/H2/Ar

1990 ◽  
Vol 56 (15) ◽  
pp. 1424-1426 ◽  
Author(s):  
S. J. Pearton ◽  
U. K. Chakrabarti ◽  
A. P. Kinsella ◽  
D. Johnson ◽  
C. Constantine
Keyword(s):  
Plasma Etching ◽  
Cyclotron Resonance ◽  
Electron Cyclotron Resonance ◽  
Electron Cyclotron ◽  
Electron Cyclotron Resonance Plasma ◽  
Resonance Plasma
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