Low-pressure hydrogen discharge maintenance in a large-size plasma source with localized high radio-frequency power deposition

2015 ◽  
Vol 22 (3) ◽  
pp. 033504 ◽  
Author(s):  
D. Todorov ◽  
A. Shivarova ◽  
Ts. Paunska ◽  
Kh. Tarnev
Sign in / Sign up

Export Citation Format

Share Document