Characterization of barium strontium titanate thin films on sapphire substrate prepared via RF magnetron sputtering system

"Barium strontium Titanate (BST) is a solid solution consist of BaTiO3 and SrTiO3 that mixed with suitable ratio. Barium strontium Titanate oxide (Ba0.8Sr0.2TiO3) thin films prepared by sol gel technique. Barium strontium Titanate thin films deposited on Si substrate and annealed at [400,500, 600 and 700] ºC. The characterization of BST films investigated by a different technique, the X-Ray Diffraction (XRD) and Scanning Electron Macroscopy (SEM) revealed the phases, crystal structure and surface topography of the films. XRD pattern shows tetragonal phase for Ba0.8Sr0.2TiO3 perovskite structure with many peaks for different plans. The films annealed at the different temperature that indicated intermediate phases on perovskite structure of Ba0.8Sr0.2TiO3.

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Preparation and Characterization of Barium Strontium Titanate Thin Films by Chemical Solution Deposition

Electroceramics in Japan VIII - Key Engineering Materials ◽

10.4028/0-87849-982-2.49 ◽

2006 ◽

pp. 49-52 ◽

Cited By ~ 1

Author(s):

Atsushi Sakurai ◽

Keisuke Kageyama ◽

Akira Ando ◽

Yukio Sakabe

Keyword(s):

Thin Films ◽

Strontium Titanate ◽

Barium Strontium Titanate ◽

Chemical Solution Deposition ◽

Chemical Solution ◽

Solution Deposition ◽

Barium Strontium

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Preparation and characterization of barium strontium titanate/silicon nanoporous pillar array composite thin films by a sol-gel method

International Journal of Minerals Metallurgy and Materials ◽

10.1007/s12613-012-0625-z ◽

2012 ◽

Vol 19 (8) ◽

pp. 762-767 ◽

Cited By ~ 1

Author(s):

Shun-hua Xiao ◽

Wei-fen Jiang

Keyword(s):

Thin Films ◽

Strontium Titanate ◽

Barium Strontium Titanate ◽

Sol Gel ◽

Composite Thin Films ◽

Pillar Array ◽

Gel Method ◽

Sol Gel Method ◽

Barium Strontium

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Radio Frequency (RF) Magnetron Sputtered Barium Strontium Titanate (BST) Thin Film

Key Engineering Materials ◽

10.4028/www.scientific.net/kem.727.942 ◽

2017 ◽

Vol 727 ◽

pp. 942-946 ◽

Cited By ~ 2

Author(s):

Juan Li ◽

Cong Chun Zhang ◽

Yan Lei Wang ◽

Yang Gao ◽

Xiao Lin Zhao

Keyword(s):

Thin Film ◽

Thin Films ◽

Dielectric Properties ◽

Strontium Titanate ◽

Barium Strontium Titanate ◽

Perovskite Phase ◽

Rf Magnetron Sputtering ◽

Barium Strontium ◽

Metal Insulator Metal ◽

Bst Thin Film

Barium strontium titanate (BST) thin films with excellent dielectric properties are deposited by on-axis RF magnetron sputtering system. The effects of composition of the target and oxygen partial pressure on the microstructure of BST thin film have been investigated. The dielectric properties of the thin films are investigated. The results show that composition of BST thin film deposited with pure argon ambient by the target with 30atm% excess of Ba and Sr is stoichiometric. Perovskite phase can be observed in the thin film annealed in oxygen at 750 °C for 30 min. A metal-insulator-metal (MIM) capacitor is fabricated by microfabrication technique. The capacitance value at 2 GHz is 0.417 pF and 1.42 pF for 50 nm and 90 nm BST thin film respectively, and the leakage current density is 6×10-6 A/cm2 and 5.35×10-8 A/cm2 respectively.

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Physical Characterization of BST with Different (x’) Ratios

Applied Mechanics and Materials ◽

10.4028/www.scientific.net/amm.487.106 ◽

2014 ◽

Vol 487 ◽

pp. 106-109

Author(s):

Nurhafizah Ramli ◽

Zaliman Sauli ◽

Vithyacharan Retnasamy ◽

They Yee Chin ◽

K. Anwar ◽

...

Keyword(s):

Thin Films ◽

Surface Roughness ◽

Strontium Titanate ◽

Barium Strontium Titanate ◽

Sol Gel ◽

Force Microscopy ◽

Atomic Force ◽

Fields Of Study ◽

Barium Strontium

Nowdays Barium strontium titanate (BST) can be applied into many fields of engineering. Its properties attracted more researchers to research and apply it into many fields of study. In this work, sol-gel method of preparing barium strontium titanate (BST) has been used. This work was done with 4 different ratio of x with 4 different deposition layers. The main purpose of this work is to investigate the relation between the ratio of barium (Ba) with different deposition layer and the surface of the substrate. Atomic force microscopy (AFM) was used in whole work to investigate the crystalline structure and surface roughness of the BST thin films.

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