Characteristics of an electron beam extracted from a microwave electron cyclotron resonance plasma cathode

2018 ◽  
Vol 89 (8) ◽  
pp. 083304 ◽  
Author(s):  
Liang Li ◽  
Yifei Liu ◽  
Longwei Chen ◽  
Gong Wang ◽  
Ming Liu ◽  
...  
Keyword(s):  
Electron Beam ◽  
Cyclotron Resonance ◽  
Electron Cyclotron Resonance ◽  
Electron Cyclotron ◽  
Plasma Cathode ◽  
Electron Cyclotron Resonance Plasma ◽  
Resonance Plasma

Electron cyclotron resonance plasma etching of InP in CH4/H2/Ar

1990 ◽  
Vol 56 (15) ◽  
pp. 1424-1426 ◽  
Author(s):  
S. J. Pearton ◽  
U. K. Chakrabarti ◽  
A. P. Kinsella ◽  
D. Johnson ◽  
C. Constantine
Keyword(s):  
Plasma Etching ◽  
Cyclotron Resonance ◽  
Electron Cyclotron Resonance ◽  
Electron Cyclotron ◽  
Electron Cyclotron Resonance Plasma ◽  
Resonance Plasma
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