Electron Beam Generation by an Electron Cyclotron Resonance Plasma

2009 ◽  
Vol 37 (2) ◽  
pp. 317-326 ◽  
Author(s):  
M. Light ◽  
T.G. Madziwa-Nussinov ◽  
P. Colestock ◽  
R. Kashuba
Keyword(s):  
Electron Beam ◽  
Cyclotron Resonance ◽  
Electron Cyclotron Resonance ◽  
Electron Cyclotron ◽  
Electron Cyclotron Resonance Plasma ◽  
Electron Beam Generation ◽  
Beam Generation ◽  
Resonance Plasma

Electron cyclotron resonance plasma etching of InP in CH4/H2/Ar

1990 ◽  
Vol 56 (15) ◽  
pp. 1424-1426 ◽  
Author(s):  
S. J. Pearton ◽  
U. K. Chakrabarti ◽  
A. P. Kinsella ◽  
D. Johnson ◽  
C. Constantine
Keyword(s):  
Plasma Etching ◽  
Cyclotron Resonance ◽  
Electron Cyclotron Resonance ◽  
Electron Cyclotron ◽  
Electron Cyclotron Resonance Plasma ◽  
Resonance Plasma
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